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Publication Information
Title:
Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
Type:
Journal
Info:
Electrochemical and Solid-State Letters, 9(1) F8-F11 (2006)
Date:
2005-09-14
Author Information
Name | Institution |
---|---|
Jung Wook Lim | Electronics and Telecommunication Research Institute, (ETRI) |
Sun Jin Yun | Electronics and Telecommunication Research Institute, (ETRI) |
Jin Ho Lee | Electronics and Telecommunication Research Institute, (ETRI) |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
194 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |