Jin Ho Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jin Ho Lee returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
2Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
3Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
4PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
5Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
6Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
7Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
8Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils