Jin Ho Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jin Ho Lee returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
2	Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
3	Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
4	Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
5	Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
6	Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
7	Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
8	PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen

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