2021 Year in Review

The publication database currently has 1628 entries.

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272 Precursors and Plasma Gases

251 Film and Plasma Characteristics

90 Theses

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Effect of atomic layer plasma treatment on TALD-ZrO₂ film to improve the corrosion protection of Mg-Ca alloy Deposition and Characterization of RP-ALD SiO₂ Thin Films with Different Oxygen Plasma Powers Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation

Search 1628 plasma ALD publications by:

203 Films Compositions

272 Precursors and Plasma Gases

77 Deposition Hardwares

251 Film and Plasma Characteristics

Jin Ho Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jin Ho Lee returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
2	Characteristics of TiO₂ Films Prepared by ALD With and Without Plasma
3	Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
4	Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
5	Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
6	Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
7	Low-Temperature Growth of SiO₂ Films by Plasma-Enhanced Atomic Layer Deposition
8	PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen