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The publication database currently has 1567 entries.

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265 Precursors and Plasma Gases

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In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films

Search 1567 plasma ALD publications by:

195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

Jin Ho Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jin Ho Lee returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
2	Characteristics of TiO₂ Films Prepared by ALD With and Without Plasma
3	Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
4	Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
5	Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
6	Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
7	Low-Temperature Growth of SiO₂ Films by Plasma-Enhanced Atomic Layer Deposition
8	PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen