Jin Ho Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jin Ho Lee returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
2Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
3Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
4Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
5Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
6Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
7Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
8PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen


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