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Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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Jin Ho Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jin Ho Lee returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
2Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
3Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
4Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
5Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
6Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
7Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
8Characteristics of TiO2 Films Prepared by ALD With and Without Plasma