Jin Ho Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jin Ho Lee returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
2Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
3Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
4Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
5PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
6Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
7Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
8Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition