Jin Ho Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jin Ho Lee returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
2Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
3PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
4Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
5Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
6Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
7Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
8Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition