Jung Wook Lim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jung Wook Lim returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
2	Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
3	Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
4	Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
5	Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
6	Electrical Properties of Alumina Films by Plasma-Enhanced Atomic Layer Deposition
7	Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
8	Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric
9	Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
10	Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
11	Optical and Electrical Properties of AlxTi1-xO Films
12	Optical and Electrical Properties of TixSi1-xOy Films
13	PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
14	Stabilization of Al2O3 gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment

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