Publication Information

Title:
Optical and Electrical Properties of TixSi1-xOy Films
Type:
Journal
Info:
ETRI Journal, Volume 31, Number 6, December 2009
Date:
2009-10-09

Author Information

Name Institution
Jung Wook LimElectronics and Telecommunication Research Institute, (ETRI)
Sun Jin YunElectronics and Telecommunication Research Institute, (ETRI)
Je Ha KimElectronics and Telecommunication Research Institute, (ETRI)

Films

Plasma TiSiO


Film/Plasma Properties

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Reflectivity
Analysis: Reflectometry

Characteristic: Unknown
Analysis: I-V, Current-Voltage Measurements

Characteristic: Chemical Composition, Impurities
Analysis: AES, Auger Electron Spectroscopy

Substrates

Si(100)
ITO

Keywords

TiSiO
Refractive Index
AR, AntiReflective Coating
Thin Film Solar Cell
Nonlinear I-V Curve

Notes

47