Optical and Electrical Properties of TixSi1-xOy Films

Type:
Journal
Info:
ETRI Journal, Volume 31, Number 6, December 2009
Date:
2009-10-09

Author Information

Name Institution
Jung Wook LimElectronics and Telecommunication Research Institute, (ETRI)
Sun Jin YunElectronics and Telecommunication Research Institute, (ETRI)
Je Ha KimElectronics and Telecommunication Research Institute, (ETRI)

Films


Film/Plasma Properties

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Reflectivity
Analysis: Reflectometry

Characteristic: Unknown
Analysis: I-V, Current-Voltage Measurements

Characteristic: Chemical Composition, Impurities
Analysis: AES, Auger Electron Spectroscopy

Substrates

Si(100)
ITO

Keywords

TiSiO
Refractive Index
AR, AntiReflective Coating
Thin Film Solar Cell
Nonlinear I-V Curve

Notes

47