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Optical and Electrical Properties of TixSi1-xOy Films
Type:
Journal
Info:
ETRI Journal, Volume 31, Number 6, December 2009
Date:
2009-10-09
Author Information
| Name | Institution |
|---|---|
| Jung Wook Lim | Electronics and Telecommunication Research Institute, (ETRI) |
| Sun Jin Yun | Electronics and Telecommunication Research Institute, (ETRI) |
| Je Ha Kim | Electronics and Telecommunication Research Institute, (ETRI) |
Films
Film/Plasma Properties
Characteristic: Refractive Index
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Reflectivity
Analysis: Reflectometry
Characteristic: Unknown
Analysis: I-V, Current-Voltage Measurements
Characteristic: Chemical Composition, Impurities
Analysis: AES, Auger Electron Spectroscopy
Substrates
| Si(100) |
| ITO |
Notes
| 47 |