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Publication Information

Title: Optical and Electrical Properties of TixSi1-xOy Films

Type: Journal

Info: ETRI Journal, Volume 31, Number 6, December 2009

Date: 2009-10-09

DOI: http://dx.doi.org/10.4218/etrij.09.1209.0033

Author Information

Name

Institution

Electronics and Telecommunication Research Institute, (ETRI)

Electronics and Telecommunication Research Institute, (ETRI)

Electronics and Telecommunication Research Institute, (ETRI)

Films

Plasma TiSiO using Custom

Deposition Temperature = 250C

546-68-9

78-10-4

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Refractive Index

Ellipsometry

Unknown

Thickness

Ellipsometry

Unknown

Reflectivity

Reflectometry

Unknown

Unknown

I-V, Current-Voltage Measurements

HP 4156B Semiconductor Parameter Analyzer

Chemical Composition, Impurities

AES, Auger Electron Spectroscopy

Unknown

Substrates

Si(100)

ITO

Keywords

TiSiO

Refractive Index

AR, AntiReflective Coating

Thin Film Solar Cell

Nonlinear I-V Curve

Notes

47



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