Sun Jin Yun Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sun Jin Yun returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Optical and Electrical Properties of TixSi1-xOy Films
2PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
3Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
4Optical and Electrical Properties of AlxTi1-xO Films
5Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
6Passivation of organic light-emitting diodes with aluminum oxide thin films grown by plasma-enhanced atomic layer deposition
7Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
8Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
9Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
10Electrical Properties of Alumina Films by Plasma-Enhanced Atomic Layer Deposition
11Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
12Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric
13Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
14Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
15Characteristics of TiO2 Films Prepared by ALD With and Without Plasma