Publication Information

Title:
Optical and Electrical Properties of AlxTi1-xO Films
Type:
Journal
Info:
Journal of the Korean Physical Society, Vol. 56, No. 1, January 2010, pp. 96-99
Date:
2009-10-12

Author Information

Name Institution
Jung Wook LimElectronics and Telecommunication Research Institute, (ETRI)
Sun Jin YunElectronics and Telecommunication Research Institute, (ETRI)
Seong Hyun LeeUniversity of Science and Technology

Films

Plasma AlTixOy


Film/Plasma Properties

Characteristic: Compositional Depth Profiling
Analysis: AES, Auger Electron Spectroscopy

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements

Characteristic: Reflectivity
Analysis: -

Substrates

Si(100)
ITO

Keywords

AlTiO
Plasma-Enhanced Atomic Layer Deposition
Reflectance
Thin Film Solar Cell
AR, AntiReflective Coating

Notes

40