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Publication Information
Title:
Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
Type:
Journal
Info:
Journal of The Electrochemical Society, 154(11) G239-G243(2007)
Date:
2007-07-05
Author Information
Name | Institution |
---|---|
Jung Wook Lim | Electronics and Telecommunication Research Institute, (ETRI) |
Sun Jin Yun | Electronics and Telecommunication Research Institute, (ETRI) |
Hyun-Tak Kim | Electronics and Telecommunication Research Institute, (ETRI) |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
193 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |