TEOS, Si(OC2H5)4, TetraEthyl OrthoSilicate, CAS# 78-10-4

Where to buy

NumberVendorRegionLink
1EntegrisπŸ‡ΊπŸ‡ΈTEOS
2EreztechπŸ‡ΊπŸ‡ΈTetraEthyl OrthoSilicate, Si(OC2H5)4, TEOS
3DOCK/CHEMICALSπŸ‡©πŸ‡ͺTetraethylorthosilicate
4Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTetraethoxysilane, min. 98% TEOS
5Pegasus ChemicalsπŸ‡¬πŸ‡§tetraethyl orthosilicate

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Optical and Electrical Properties of TixSi1-xOy Films
2Radical Enhanced Atomic Layer Deposition of Metals and Oxides
3Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition
4Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
5Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
6Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
7Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition