TEOS, Si(OC2H5)4, TetraEthyl OrthoSilicate, CAS# 78-10-4
Where to buy
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | Pegasus Chemicals | 🇬🇧 | tetraethyl orthosilicate |
| 2 | DOCK/CHEMICALS | 🇩🇪 | Tetraethylorthosilicate |
| 3 | Strem Chemicals, Inc. | 🇺🇸 | Tetraethoxysilane, min. 98% TEOS |
| 4 | Entegris | 🇺🇸 | TEOS |
| 5 | Ereztech | 🇺🇸 | TetraEthyl OrthoSilicate, Si(OC2H5)4, TEOS |
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Plasma Enhanced Atomic Layer Deposition Film Publications
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