TiSiO Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing TiSiO films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition|
|2||Optical and Electrical Properties of TixSi1-xOy Films|