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Publication Information

Title: Hafnia and alumina on sulphur passivated germanium

Type: Journal

Info: Vacuum, Volume 122, Part B, 2015, Pages 306 - 309

Date: 2015-03-18

DOI: http://dx.doi.org/10.1016/j.vacuum.2015.03.017

Author Information

Name

Institution

University of Liverpool

University of Liverpool

University of Liverpool

University of Liverpool

University of Liverpool

University of Liverpool

University of Liverpool

Films

Deposition Temperature = 250C

0-0-0

7782-44-7

Deposition Temperature = 250C

0-0-0

7732-18-5

Deposition Temperature = 250C

75-24-1

7782-44-7

Deposition Temperature = 250C

75-24-1

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Interfacial Layer

XPS, X-ray Photoelectron Spectroscopy

Unknown

Substrates

Ge

Keywords

Passivation

Notes

478

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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