Steve Hall Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Steve Hall returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
2Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
3A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
4Hafnia and alumina on sulphur passivated germanium