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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
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Ivona Z. Mitrovic Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ivona Z. Mitrovic returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
2A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
3Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
4Hafnia and alumina on sulphur passivated germanium