Paul R. Chalker Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Paul R. Chalker returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al2O3 on GaN based metal oxide semiconductor capacitor
2Atomic Layer Deposition of Niobium Nitride from Different Precursors
3Hafnia and alumina on sulphur passivated germanium
4Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
5Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition