Paul R. Chalker Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Paul R. Chalker returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1α-Ga2O3 grown by low temperature atomic layer deposition on sapphire
2Hafnia and alumina on sulphur passivated germanium
3Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
4Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
5A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
6Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
7A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al2O3 on GaN based metal oxide semiconductor capacitor
8Atomic Layer Deposition of Niobium Nitride from Different Precursors
9Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition