Paul R. Chalker Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Paul R. Chalker returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1α-Ga2O3 grown by low temperature atomic layer deposition on sapphire
2Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
3Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
4A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
5A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al2O3 on GaN based metal oxide semiconductor capacitor
6Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
7Hafnia and alumina on sulphur passivated germanium
8Atomic Layer Deposition of Niobium Nitride from Different Precursors