S. Mather Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by S. Mather returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Hafnia and alumina on sulphur passivated germanium|
|2||Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition|