Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.


Astrid Bingel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Astrid Bingel returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
2Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
3Comparative study of ALD SiO2 thin films for optical applications
4High-Reflective Coatings For Ground and Space Based Applications