Theoretical Understanding of the Reaction Mechanism of SiO2 Atomic Layer Deposition
Type:
Journal
Info:
Chem. Mater. 2016, 28, 1247-1255
Date:
2016-02-16
Author Information
| Name | Institution |
|---|---|
| Guo-Yong Fang | Wenzhou University |
| Lina Xu | Wenzhou University |
| Jing Ma | Nanjing University |
| Aidong Li | Nanjing University |
Films
Film/Plasma Properties
Characteristic: Deposition Kinetics, Reaction Mechanism
Analysis: DFT, Density Functional Theory
Substrates
Notes
| PEALD discussion limited to recap of reference 22 which is here. |
| 768 |