Publication Information

Title: Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2

Type: Journal

Info: Chem. Commun., 2015, 51, 1341-1344

Date: 2014-12-01

DOI: http://dx.doi.org/10.1039/C4CC08004A

Author Information

Name

Institution

Nanjing University

Films

Plasma SiO2 using Unknown

Deposition Temperature Range N/A

0-0-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Density Functional Theory (DFT)

Notes

Density Functional Theory (DFT) of SiO2 PEALD with aminosilanes.

285

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com