Oxygen, O2, CAS# 7782-44-7

Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberCompositionTitle
1Al:BaTiO3Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
2Al:WO3Optical and electrical properties of Al:WS2 films prepared by atomic layer deposition and vulcanization
3Al2O3'Zero-charge' SiO2/Al2O3 stacks for the simultaneous passivation of n+ and p+ doped silicon surfaces by atomic layer deposition
4Al2O31D versus 3D quantum confinement in 1-5 nm ZnO nanoparticle agglomerations for application in charge-trapping memory devices
5Al2O346-2: Multi-Level-Pressure Touch Sensors with P(VDF-TrFE) Deposited on Metal Oxide Thin Film Transistor
6Al2O3A Capacitance-to-Frequency Converter with On-Chip Passivated Microelectrodes for Bacteria Detection in Saline Buffers up to 575 MHz
7Al2O3A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
8Al2O3A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
9Al2O3Advanced surface passivation of epitaxial boron emitters for high-efficiency ultrathin crystalline silicon solar cells
10Al2O3Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors
11Al2O3Advances in the fabrication of graphene transistors on flexible substrates
12Al2O3Al2O3 multi-density layer structure as a moisture permeation barrier deposited by radio frequency remote plasma atomic layer deposition
13Al2O3Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
14Al2O3Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
15Al2O3Al2O3/TiO2 Nanolaminate Thin Film Encapsulation for Organic Thin Film Transistors via Plasma-Enhanced Atomic Layer Deposition
16Al2O3ALD Protection of Li-Metal Anode Surfaces - Quantifying and Preventing Chemical and Electrochemical Corrosion in Organic Solvent
17Al2O3AlGaN/GaN MIS-HEMT Gate Structure Improvement Using Al2O3 Deposited by PEALD
18Al2O3AlGaN/GaN MIS-HEMT gate structure improvement using Al2O3 deposited by plasma-enhanced ALD
19Al2O3Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources
20Al2O3Aluminum oxide – n-Si field effect inversion layer solar cells with organic top contact
21Al2O3Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties
22Al2O3An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD
23Al2O3Analog/RF Study of Self-aligned In0.53Ga0.47As MOSFET with Scaled Gate Length
24Al2O3Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
25Al2O3Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN
26Al2O3Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices
27Al2O3Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
28Al2O3Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure
29Al2O3Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell
30Al2O3Band alignment and electrical properties of Al2O3/β-Ga2O3 heterojunctions
31Al2O3Band alignment of Al2O3 with (-201) β-Ga2O3
32Al2O3Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer
33Al2O3Breakdown and Protection of ALD Moisture Barrier Thin Films
34Al2O3Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
35Al2O3Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
36Al2O3Capacitance-voltage characterization of Al2O3/GaN-on-insulator (GaNOI) structures with TMAH surface treatment
37Al2O3Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx:H stacks
38Al2O3Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method
39Al2O3Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
40Al2O3Characteristics of Charge Trap Flash Memory with Al2O3/(Ta/Nb)Ox/Al2O3 Multi-Layer
41Al2O3Characterization of CVD graphene permittivity and conductivity in micro-/millimeter wave frequency range
42Al2O3Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
43Al2O3Characterizations of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition
44Al2O3Charge effects of ultrafine FET with nanodot type floating gate
45Al2O3Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
46Al2O3Chemical Protection of Polycarbonate Surfaces by Atomic Layer Deposition of Alumina with Oxygen Plasma Pretreatment
47Al2O3Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
48Al2O3Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
49Al2O3Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
50Al2O3Corrosion barriers for silver-based telescope mirrors: comparative study of plasma-enhanced atomic layer deposition and reactive evaporation of aluminum oxide
51Al2O3Coupled used of SKP and C-V measurements to highlight the charge distribution and behavior in the Si/SiO2/Al2O3 stack for silicon solar cells surface passivation
52Al2O3Damage evaluation in graphene underlying atomic layer deposition dielectrics
53Al2O3DC characteristics of ALD-grown Al2O3/AlGaN/GaN MIS-HEMTs and HEMTs at 600°C in air
54Al2O3Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process
55Al2O3Demonstration of flexible thin film transistors with GaN channels
56Al2O3Densification of Thin Aluminum Oxide Films by Thermal Treatments
57Al2O3Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices
58Al2O3Detection of Streptavidin-Biotin Complexes Using a Highly Sensitive AlGaN/GaN-Based Extended-Gate MISHEMT-Type Biosensor
59Al2O3DFT modeling of plasma-assisted atomic layer deposition for Si(110) passivation: formation of boehmite-like chains as γ-Al2O3 precursors
60Al2O3Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
61Al2O3Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
62Al2O3Direct measurement of coherent phonon dynamics in solution-processed stibnite thin films
63Al2O3Distribution and coverage of 40 nm gold nano-particles on aluminum and hafnium oxide using electrophoretic method and fabricated MOS structures
64Al2O3Dynamic tuning of plasmon resonance in the visible using graphene
65Al2O3Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films
66Al2O3Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure
67Al2O3Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
68Al2O3Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISHFET
69Al2O3Effect of Hydrogen in Gate Insulator on NBIS Performance of Oxide Thin Film Transistor
70Al2O3Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition
71Al2O3Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
72Al2O3Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures
73Al2O3Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems
74Al2O3Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3 gate dielectric thin films
75Al2O3Effects of Surface Passivation and Deposition Methods on the 1/f Noise Performance of AlInN/AlN/GaN High Electron Mobility Transistors
76Al2O3Electrical and chemical characterization of Al2O3 passivation layer deposited by plasma-assisted atomic layer deposition in c-Si solar cells
77Al2O3Electrical Characteristics of n, p-In0.53Ga0.47As MOSCAPs With In Situ PEALD-AlN Interfacial Passivation Layer
78Al2O3Electrical characterization and reliability analysis of Al2O3/AlGaN/GaN MISH structure
79Al2O3Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
80Al2O3Electrical characterization of the slow boron oxygen defect component in Czochralski silicon
81Al2O3Electrical Measurement Under Atmospheric Conditons of PbSe Nanocrystal Thin Films Passivated by Remote Plasma Atomic Layer Deposition of Al2O3
82Al2O3Electrical Properties of Alumina Films by Plasma-Enhanced Atomic Layer Deposition
83Al2O3Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
84Al2O3Electrical properties of MOS capacitors formed by PEALD grown Al2O3 on silicon
85Al2O3Electrically Excited Plasmonic Nanoruler for Biomolecule Detection
86Al2O3Electron channel mobility in silicon-doped Ga2O3 MOSFETs with a resistive buffer layer
87Al2O3Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
88Al2O3Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
89Al2O3Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
90Al2O3Energy-enhanced atomic layer deposition for more process and precursor versatility
91Al2O3Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films
92Al2O3Enhanced electrochemical performance of surface-treated Li[Ni0.8Co0.1Mn0.1]O2 cathode material for lithium-ion batteries
93Al2O3Enhanced surface passivation of epitaxially grown emitters for high-efficiency ultrathin crystalline Si solar cells
94Al2O3Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process
95Al2O3Enhancement of mobility in ultra-thin-body GeOI p-channel metal-oxide-semiconductor field effect transistors with Si-passivated back interfaces
96Al2O3Enhancement of reliability and stability for transparent amorphous indium-zinc-tin-oxide thin film transistors
97Al2O3Enhancement-mode AlGaN/GaN MIS-HEMTs with low threshold voltage hysteresis using damage-free neutral beam etched gate recess
98Al2O3Epitaxially grown crystalline Al2O3 interlayer on β-Ga2O3 (010) and its suppressed interface state density
99Al2O3Evaluation of Thermal Versus Plasma-Assisted ALD Al2O3 as Passivation for InAlN/AlN/GaN HEMTs
100Al2O3Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric
101Al2O3Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
102Al2O3Experimental verification of electro-refractive phase modulation in graphene
103Al2O3Fabrication and Properties of GaN MIS Capacitors with a Remote-Plasma Atomic-Layer-Deposited Al2O3 Gate Dielectric
104Al2O3Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier
105Al2O3Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
106Al2O3Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al2O3
107Al2O3Field-Plated Ga2O3 MOSFETs With a Breakdown Voltage of Over 750 V
108Al2O3Firing Stable Al2O3/SiNx Layer Stack Passivation for the Front Side Boron Emitter of n-type Silicon Solar Cells
109Al2O3Fixed-Gap Tunnel Junction for Reading DNA Nucleotides
110Al2O3Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
111Al2O3Flexible, light trapping substrates for organic photovoltaics
112Al2O3Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
113Al2O3Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
114Al2O3Hafnia and alumina on sulphur passivated germanium
115Al2O3High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
116Al2O3High-efficiency embedded transmission grating
117Al2O3High-Reflective Coatings For Ground and Space Based Applications
118Al2O3Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
119Al2O3Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
120Al2O3Hydrophilic/hydrophobic surface of Al2O3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC)
121Al2O3Impact of hydrogen on the permanent deactivation of the boron-oxygen-related recombination center in crystalline silicon
122Al2O3Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors
123Al2O3Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches
124Al2O3Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
125Al2O3Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric
126Al2O3Improved understanding of recombination at the Si/Al2O3 interface
127Al2O3Improvement of Capacitance Equivalent Thickness, Leakage Current, and Interfacial State Density Based on Crystallized High-K Dielectrics/Nitrided Buffer Layer Gate Stacks
128Al2O3Improvement of interfacial and electrical properties of Al2O3/n-Ga0.47In0.53As for III-V impact ionization MOSFETs
129Al2O3Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
130Al2O3Improving Thermal Stability and Interface State Density of High-k Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium
131Al2O3In situ plasma enhanced atomic layer deposition half cycle study of Al2O3 on AlGaN/GaN high electron mobility transistors
132Al2O3In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
133Al2O3In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
134Al2O3Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells
135Al2O3Influence of Al2O3 Gate Dielectric on Transistor Properties for IGZO Thin Film Transistor
136Al2O3Influence of Al2O3 layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors
137Al2O3Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface
138Al2O3Influence of infrared radiation on the electrical characteristics of the surface-barrier nanostructures based on MBE HgCdTe
139Al2O3Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
140Al2O3Influence of oxidant source on the property of atomic layer deposited Al2O3 on hydrogen-terminated Si substrate
141Al2O3Influence of the charge trap density distribution in a gate insulator on the positive-bias stress instability of amorphous indium-gallium-zinc oxide thin-film transistors
142Al2O3Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD
143Al2O3Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
144Al2O3Influence of Working Pressure on the Al2O3 Film Properties in Plasma-Enhanced Atomic Layer Deposition
145Al2O3Injection dependence of the effective lifetime of n-type Si passivated by Al2O3: An edge effect?
146Al2O3Insulator-protected mechanically controlled break junctions for measuring single-molecule conductance in aqueous environments
147Al2O3Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene
148Al2O3Integration of plasmonic Ag nanoparticles as a back reflector in ultra-thin Cu(In,Ga)Se2 solar cells
149Al2O3Interface effect on dielectric constant of HfO2/Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition
150Al2O3Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3
151Al2O3Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface
152Al2O3Investigation of Atomic Layer Deposition Al2O3 Passivation for Screen-Printed Large-Area Solar Cells
153Al2O3Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
154Al2O3Junctionless Gate-All-Around pFETs Using In-situ Boron-Doped Ge Channel on Si
155Al2O3Kinetics of the permanent deactivation of the boron-oxygen complex in crystalline silicon as a function of illumination intensity
156Al2O3Laminated Al2O3-HfO2 layers grown by atomic layer deposition for microelectronics applications
157Al2O3Leakage Current Reduction in ALD-Al2O3 Dielectric Deposited on Si by High Pressure Deuterium Oxide Annealing
158Al2O3Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
159Al2O3Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon
160Al2O3Liquid-Phase Crystallized Silicon Solar Cells on Glass: Increasing the Open-Circuit Voltage by Optimized Interlayers for n- and p-Type Absorbers
161Al2O3Liquids on-chip: direct storage and release employing micro-perforated vapor barrier films
162Al2O3Localized defect states and charge trapping in atomic layer deposited-Al2O3 films
163Al2O3Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al2O3 and Parylene C for Biomedical Implantable Devices
164Al2O3Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition
165Al2O3Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
166Al2O3Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
167Al2O3Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
168Al2O3Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
169Al2O3Lytic enzymes as selectivity means for label-free, microfluidic and impedimetric detection of whole-cell bacteria using ALD-Al2O3 passivated microelectrodes
170Al2O3MANOS performance dependence on ALD Al2O3 oxidation source
171Al2O3Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si
172Al2O3Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
173Al2O3Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
174Al2O3Method of Fabrication for Encapsulated Polarizing Resonant Gratings
175Al2O3Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
176Al2O3Minority carrier lifetime limitations in Si wafer solar cells with gallium phosphide window layers
177Al2O3Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system
178Al2O3Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
179Al2O3Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures
180Al2O3Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor
181Al2O3Multi-functional touch sensors with strained P(VDF-TrFE) deposited on metal oxide thin film transistor
182Al2O3N-doped TiO2 nanotubes coated with a thin TaOxNy layer for photoelectrochemical water splitting: dual bulk and surface modification of photoanodes
183Al2O3Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
184Al2O3Nanoscopic structural rearrangements of the Cu-filament in conductive-bridge memories
185Al2O3Nanotextured surfaces for surface enhanced Raman spectroscopy and sensors
186Al2O3Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC
187Al2O3Normally-off AlGaN/GaN recessed MOS-HEMTs on normally-on epitaxial structures for microwave power applications
188Al2O3Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
189Al2O3On the composition of luminescence spectra from heavily doped p-type silicon under low and high excitation
190Al2O3On the role of nanoporosity in controlling the performance of moisture permeation barrier layers
191Al2O3Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
192Al2O3Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
193Al2O3Oxidation precursor dependence of atomic layer deposited Al2O3 films in a-Si:H(i)/Al2O3 surface passivation stacks
194Al2O3Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
195Al2O3Passivation effects of atomic-layer-deposited aluminum oxide
196Al2O3Patterned deposition by plasma enhanced spatial atomic layer deposition
197Al2O3Performance and retention characteristics of nanocrystalline Si floating gate memory with an Al2O3 tunnel layer fabricated by plasma-enhanced atomic layer deposition
198Al2O3Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition
199Al2O3Photoluminescence and electroluminescence from Ge/strained GeSn/Ge quantum wells
200Al2O3Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN
201Al2O3Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments
202Al2O3Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors
203Al2O3Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
204Al2O3Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
205Al2O3Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
206Al2O3Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics
207Al2O3Plasma-Assisted Atomic Layer Deposition of Al2O3 at Room Temperature
208Al2O3Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications
209Al2O3Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
210Al2O3Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor
211Al2O3Plasma-Enhanced Atomic Layer Deposition of Ultrathin Oxide Coatings for Stabilized Lithium-Sulfur Batteries
212Al2O3Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
213Al2O3Propagation Effects in Carbon Nanoelectronics
214Al2O3Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition
215Al2O3Realistic efficiency potential of next-generation industrial Czochralski-grown silicon solar cells after deactivation of the boron-oxygen-related defect center
216Al2O3Remote plasma atomic layer deposited Al2O3 4H-SiC MOS capacitor with remote H2 plasma passivation and post metallization annealing
217Al2O3Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
218Al2O3Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition
219Al2O3Role of Metal Contacts in Designing High-Performance Monolayer n-Type WSe2 Field Effect Transistors
220Al2O3Role of the (Ta/Nb)Ox/Al2O3 interface on the flatband voltage shift for Al2O3/(Ta/Nb)Ox/Al2O3 multilayer charge trap capacitors
221Al2O3Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application
222Al2O3Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
223Al2O3Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
224Al2O3Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride
225Al2O3Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
226Al2O3Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
227Al2O3Simple silicon solar cells featuring an a-Si:H enhanced rear MIS contact
228Al2O3Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides
229Al2O3Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen
230Al2O3Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon
231Al2O3Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
232Al2O3Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction
233Al2O3Stretchable Carbon Nanotube Charge-Trap Floating-Gate Memory and Logic Devices for Wearable Electronics
234Al2O3Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
235Al2O3Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure
236Al2O3Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
237Al2O3Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3
238Al2O3Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
239Al2O3Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition
240Al2O3Surface-enhanced gallium arsenide photonic resonator with a quality factor of six million
241Al2O3Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
242Al2O3Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
243Al2O3Terahertz Quantum Plasmonics of Nanoslot Antennas in Nonlinear Regime
244Al2O3The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
245Al2O3The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
246Al2O3The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
247Al2O3Thermal and Plasma Enhanced Atomic Layer Deposition of Al2O3 on GaAs Substrates
248Al2O3Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
249Al2O3Threshold voltage controlled by gate area and gate recess in inverted trapezoidal trigate AlGaN/GaN MOS high-electron-mobility transistors with photoenhanced chemical and plasma-enhanced atomic layer deposition oxides
250Al2O3TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
251Al2O3Toward an integrated device for spatiotemporal superposition of free-electron lasers and laser pulses
252Al2O3Toward reliable MIS- and MOS-gate structures for GaN lateral power devices
253Al2O3Tri-gate InGaAs-OI junctionless FETs with PE-ALD Al2O3 gate dielectric and H2/Ar anneal
254Al2O3Tunable conduction type of solution-processed germanium nanoparticle based field effect transistors and their inverter integration
255Al2O3Tuning the Ge(Sn) Tunneling FET: Influence of Drain Doping, Short Channel, and Sn Content
256Al2O3Tuning the nanoscale morphology and optical properties of porous gold nanoparticles by surface passivation and annealing
257Al2O3Tuning the phase transitions of VO2 thin films on silicon substrates using ultrathin Al2O3 as buffer layers
258Al2O3Ultra-thin Al2O3 coating on the acid-treated 0.3Li2MnO3·0.7LiMn0.60Ni0.25Co0.15O2 electrode for Li-ion batteries
259Al2O3Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
260Al2O3Ultrathin Surface Coating Enables the Stable Sodium Metal Anode
261Al2O3Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
262Al2O3Vertical Ge and GeSn heterojunction gate-all-around tunneling field effect transistors
263Al2O3Very high frequency plasma reactant for atomic layer deposition
264Al2O3Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
265Al2O3Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition
266AlMgOExcellent surface passivation of crystalline silicon by ternary AlxMg1-xOy thin films
267AlONImproved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
268AlONImproved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric
269AlONImprovement of Capacitance Equivalent Thickness, Leakage Current, and Interfacial State Density Based on Crystallized High-K Dielectrics/Nitrided Buffer Layer Gate Stacks
270AlONInterface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3
271AlONStabilization of Al2O3 gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment
272AlONThin effective oxide thickness (~0.5 nm) and low leakage current gate dielectric for Ge MOS devices by plasma nitrided Al2O3 intermediate layer
273AlPxOyAtomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
274AlSixOyBand offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy
275AlSixOyCharacteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
276AlSixOyComposite materials and nanoporous thin layers made by atomic layer deposition
277AlSixOyElectrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
278AlSixOyNanoporous SiO2 thin films made by atomic layer deposition and atomic etching
279AlStTiOEffect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure
280AlTixOyAl2O3/TiO2 Nanolaminate Thin Film Encapsulation for Organic Thin Film Transistors via Plasma-Enhanced Atomic Layer Deposition
281AlTixOyCharacteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
282AlTixOyLow-frequency dielectric properties of intrinsic and Al-doped rutile TiO2 thin films grown by the atomic layer deposition technique
283AlTixOyOptical and Electrical Properties of AlxTi1-xO Films
284AlTixOyPlasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
285AlTixOyPlasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
286AlTixOyRutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
287AuAtomic Layer Deposition of Gold Metal
288B:SiO2Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
289B2O3Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
290B2O3Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
291BaOPlasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
292BaTiO3High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films
293BaTiO3Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
294BaTiO3Plasma-enhanced atomic layer deposition of BaTiO3
295Bi2O3Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
296BiFeO3Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
297CeO2Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
298CoOxA multifunctional biphasic water splitting catalyst tailored for integration with high-performance semiconductor photoanodes
299CoOxAtomic layer deposition of Co3O4 on carbon nanotubes/carbon cloth for high-capacitance and ultrastable supercapacitor electrode
300CoOxCharge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer
301CoOxCo3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
302CoOxEfficient and Sustained Photoelectrochemical Water Oxidation by Cobalt Oxide/Silicon Photoanodes with Nanotextured Interfaces
303CoOxIntegrated Semiconductor/Catalyst Assemblies for Sustained Photoanodic Water Oxidation
304CoOxRemote Plasma Atomic Layer Deposition of Co3O4 Thin Film
305CoOxRemote Plasma Atomic Layer Deposition of Co3O4 Thin Films
306CoOxSubstrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
307CoOxUnderstanding the Oxygen Evolution Reaction Mechanism on CoOx using Operando Ambient-Pressure X-ray Photoelectron Spectroscopy
308Cr2O3Radical Enhanced Atomic Layer Deposition of Metals and Oxides
309CuOxRadical Enhanced Atomic Layer Deposition of Metals and Oxides
310Did Not WorkDeposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
311Dy2O3Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition
312Er:Al2O3Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement
313Er2O3Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement
314Er2O3Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
315Er2O3Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition
316Er2O3Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
317Fe2O3Plasma enhanced atomic layer deposition of Fe2O3 thin films
318Fe2O3Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
319Ga:ZnOThe Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
320Ga2O3Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors
321Ga2O3Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p+ Regions
322Ga2O3Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
323Ga2O3Electrical characteristics of β-Ga2O3 thin films grown by PEALD
324Ga2O3Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
325Ga2O3Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
326Ga2O3Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition
327Ga2O3Plasma enhanced atomic layer deposition of Ga2O3 thin films
328Ga2O3Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
329Ga2O3Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
330Ga2O3RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma
331Ga2O3Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride
332Gd2O3Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide
333GeZrO2Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications
334HfAlOxProperties of HfAlO film deposited by plasma enhanced atomic layer deposition
335HfAlOxTailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
336HfLaOxBand alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
337HfLaOxCharacteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
338HfLaOxComparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
339HfLaOxFerroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
340HfLaOxLow temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
341HfLaOxProperties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
342HfO2A sub-1-volt analog metal oxide memristive-based synaptic device with large conductance change for energy-efficient spike-based computing systems
343HfO2An improvement of HfO2/Ge interface by in situ remote N2 plasma pretreatment for Ge MOS devices
344HfO2Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
345HfO2Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
346HfO2AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
347HfO2Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
348HfO2Characterization of hafnium oxide resistive memory layers deposited on copper by atomic layer deposition
349HfO2Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
350HfO2Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
351HfO2Damage evaluation in graphene underlying atomic layer deposition dielectrics
352HfO2Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
353HfO2Distribution and coverage of 40 nm gold nano-particles on aluminum and hafnium oxide using electrophoretic method and fabricated MOS structures
354HfO2Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
355HfO2Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
356HfO2Effect of hydrogen participation on the improvement in electrical characteristics of HfO2 gate dielectrics by post-deposition remote N2 , N2/H2, and NH3 plasma treatments
357HfO2Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
358HfO2Effects of Fluorine Plasma Treatment on the Electronic Structure of Plasma-Enhanced Atomic Layer Deposition HfO2
359HfO2Effects of rapid thermal annealing on the properties of HfO2/La2O3 nanolaminate films deposited by plasma enhanced atomic layer deposition
360HfO2Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
361HfO2Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
362HfO2Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
363HfO2Gate-tunable high mobility remote-doped InSb/In1-xAlxSb quantum well heterostructures
364HfO2Hafnia and alumina on sulphur passivated germanium
365HfO2HfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer
366HfO2Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
367HfO2Hot Carrier Filtering in Solution Processed Heterostructures: A Paradigm for Improving Thermoelectric Efficiency
368HfO2Improvement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma
369HfO2Improving Thermal Stability and Interface State Density of High-k Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium
370HfO2In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
371HfO2Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
372HfO2Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
373HfO2Interface effect on dielectric constant of HfO2/Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition
374HfO2Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface
375HfO2Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
376HfO2Laminated Al2O3-HfO2 layers grown by atomic layer deposition for microelectronics applications
377HfO2Long period gratings coated with hafnium oxide by plasma-enhanced atomic layer deposition for refractive index measurements
378HfO2Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition
379HfO2Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
380HfO2Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
381HfO2Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
382HfO2Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
383HfO2Optical properties and bandgap evolution of ALD HfSiOx films
384HfO2Plasma assisted atomic layer deposited hafnium oxide films for silicon surface passivation
385HfO2Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
386HfO2Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
387HfO2Pt Nanocrystals Embedded in Remote Plasma Atomic-Layer-Deposited HfO2 for Nonvolatile Memory Devices
388HfO2Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
389HfO2Resistive switching in HfO2-based atomic layer deposition grown metal-insulator-metal structures
390HfO2Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides
391HfO2Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
392HfO2Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
393HfO2Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
394HfO2Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
395HfO2The effect of atomic layer deposition temperature on switching properties of HfOx resistive RAM devices
396HfO2The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
397HfO2The Influence of Technology and Switching Parameters on Resistive Switching Behavior of Pt/HfO2/TiN MIM Structures
398HfO2Total-dose radiation response and and post-irradiation annealing response of Hafnium capacitors
399HfO2Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
400HfO2Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
401HfOFEffects of Fluorine Plasma Treatment on the Electronic Structure of Plasma-Enhanced Atomic Layer Deposition HfO2
402HfONElectrical and physical characteristics of high-k gated MOSFETs with in-situ H2O and O2 plasma formed interfacial layer
403HfONHfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer
404HfONImprovement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma
405HfSiOxAnnealing behavior of ferroelectric Si-doped HfO2 thin films
406HfSiOxEffect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
407HfSiOxFerroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
408HfSiOxInfluence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
409HfSiOxOptical properties and bandgap evolution of ALD HfSiOx films
410HfSiOxTaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
411HfSiOxThe effects of layering in ferroelectric Si-doped HfO2 thin films
412In2(S,O)3Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
413In2(S,O)3Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
414In2O3Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition
415In2O3High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
416In2O3High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition
417In2O3Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
418In2O3Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
419IrHigh-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
420IrSystematic efficiency study of line-doubled zone plates
421IrTiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
422IrO2IrO2 Nanodot Formation by Plasma Enhanced Atomic Layer Deposition as a Charge Storage Layer
423La2O3Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
424La2O3Effect of Thermal Annealing on La2O3 Films Grown by Plasma Enhanced Atomic Layer Deposition
425La2O3Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition
426La2O3Effects of rapid thermal annealing on the properties of HfO2/La2O3 nanolaminate films deposited by plasma enhanced atomic layer deposition
427La2O3Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
428La2O3Growth characteristics and electrical properties of La2O3 gate oxides grown by thermal and plasma-enhanced atomic layer deposition
429La2O3Resistive switching properties of plasma enhanced-ALD La2O3 for novel nonvolatile memory application
430Li2CO3Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
431Li2CO3Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
432Li2OAtomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
433LiCoO2Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
434MgxZn1-xOUltraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition
435MgOIn situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
436MgOPlasma enhanced atomic layer deposition of magnesium oxide as a passivation layer for enhanced photoluminescence of ZnO nanowires
437MoOxAtomic layer deposition for perovskite solar cells: research status, opportunities and challenges
438MoOxAtomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
439MoOxControllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
440MoOxLow-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
441MoOxPlasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells
442MoOxProcess Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
443MoOxThe important role of water in growth of monolayer transition metal dichalcogenides
444MoWOControllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
445Nb2O5Alloyed 2D Metal-Semiconductor Atomic Layer Junctions
446Nb2O5Radical Enhanced Atomic Layer Deposition of Metals and Oxides
447NiOxAtomic layer deposition for perovskite solar cells: research status, opportunities and challenges
448NiOxRadical Enhanced Atomic Layer Deposition of Metals and Oxides
449PdAtomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
450PdSub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
451Plasma StudyIon and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
452PtAtomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
453PtCatalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
454PtEncapsulation method for atom probe tomography analysis of nanoparticles
455PtGrowth of silica nanowires in vacuum
456PtIn situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
457PtNucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
458PtParallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
459PtPlasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
460PtRemote Plasma ALD of Platinum and Platinum Oxide Films
461PtRemote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
462PtRoom-Temperature Atomic Layer Deposition of Platinum
463PtSerpentine geometry for enhanced performance of nanometer-thin platinum bolometers
464PtStructural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
465PtStructure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
466PtSub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
467PtSupportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
468PtSurface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
469PtSurface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
470PtSynthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity
471PtThe size effect of titania-supported Pt nanoparticles on the electrocatalytic activity towards methanol oxidation reaction primarily via the bifunctional mechanism
472PtO2Remote Plasma ALD of Platinum and Platinum Oxide Films
473PtO2Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
474RuAtomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
475RuAtomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
476RuAtomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
477RuIn situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
478RuReliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration
479RuStructural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
480RuStructure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
481RuThermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
482RuUnderstanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
483RuO2ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
484RuO2Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
485RuO2Effect of annealing conditions on formation of SrRuO3 films by interfacial reaction of SrO/RuO2 bi-layer films
486RuO2Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
487RuO2Radical Enhanced Atomic Layer Deposition of Metals and Oxides
488RuO2Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing
489RuO2Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
490Sb2O5Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
491SiO2'Zero-charge' SiO2/Al2O3 stacks for the simultaneous passivation of n+ and p+ doped silicon surfaces by atomic layer deposition
492SiO2Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
493SiO2Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics
494SiO2Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
495SiO2Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
496SiO2Breakdown and Protection of ALD Moisture Barrier Thin Films
497SiO2Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
498SiO2Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
499SiO2Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer
500SiO2Comparative study of ALD SiO2 thin films for optical applications
501SiO2Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
502SiO2Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
503SiO2Designing high performance precursors for atomic layer deposition of silicon oxide
504SiO2Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
505SiO2Energy-enhanced atomic layer deposition for more process and precursor versatility
506SiO2Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions
507SiO2Gate Insulator for High Mobility Oxide TFT
508SiO2Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
509SiO2High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal-Organic Silicon Precursor and Oxygen Radical
510SiO2High-Reflective Coatings For Ground and Space Based Applications
511SiO2Improved film quality of plasma enhanced atomic layer deposition SiO2 using plasma treatment cycle
512SiO2Index matching at the nanoscale: light scattering by core-shell Si/SiOx nanowires
513SiO2Interfacial, Electrical, and Band Alignment Characteristics of HfO2/Ge Stacks with In Situ-Formed SiO2 Interlayer by Plasma-Enhanced Atomic Layer Deposition
514SiO2Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
515SiO2Irradiation effects of graphene-enhanced gallium nitride (GaN) metal-semiconductor-metal (MSM) ultraviolet photodetectors
516SiO2Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
517SiO2Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
518SiO2Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
519SiO2Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
520SiO2Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
521SiO2Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors
522SiO2On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
523SiO2On the role of nanoporosity in controlling the performance of moisture permeation barrier layers
524SiO2Optical properties and bandgap evolution of ALD HfSiOx films
525SiO2Photoluminescence and electroluminescence from Ge/strained GeSn/Ge quantum wells
526SiO2Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors
527SiO2Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
528SiO2Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
529SiO2Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
530SiO2Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
531SiO2Plasma-enhanced atomic layer deposition of silicon dioxide films using plasma-activated triisopropylsilane as a precursor
532SiO2Poly-Si gate electrodes for AlGaN/GaN HEMT with high reliability and low gate leakage current
533SiO2Radical Enhanced Atomic Layer Deposition of Metals and Oxides
534SiO2Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
535SiO2Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2
536SiO2Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
537SiO2Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
538SiO2Single-Cell Photonic Nanocavity Probes
539SiO2Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides
540SiO2Spectral analysis of sidewall roughness during resist-core self-aligned double patterning integration
541SiO2Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach
542SiO2Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO2 and β-Ga2O3 (2̅01)
543SiO2Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction
544SiO2Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
545SiO2Symmetrical Al2O3-based passivation layers for p- and n-type silicon
546SiO2Theoretical Understanding of the Reaction Mechanism of SiO2 Atomic Layer Deposition
547SiO2Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
548SiO2Trapped charge densities in Al2O3-based silicon surface passivation layers
549SiONPlasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
550SnO2Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries
551SnO2Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
552SnO2Characteristics of Plasma-Enhanced Atomic-Layer Deposited (PEALD) SnO2 Thin Films
553SnO2Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations
554SnO2Low-temperature plasma-enhanced atomic layer deposition of tin oxide electron selective layers for highly efficient planar perovskite solar cells
555SnO2Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
556SnO2SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
557SnO2Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD
558SnO2Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
559SrOEffect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure
560SrOEffect of annealing conditions on formation of SrRuO3 films by interfacial reaction of SrO/RuO2 bi-layer films
561SrOEnhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
562SrOLow-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
563SrOPlasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4
564SrTa2O6Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD)
565SrTiO3Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
566SrTiO3Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure
567SrTiO3Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO3 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
568SrTiO3Energy dissipation during pulsed switching of strontium-titanate based resistive switching memory devices
569SrTiO3Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
570SrTiO3Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
571SrTiO3Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films
572SrTiO3Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
573SrTiO3Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4
574SrTiO3Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
575SrTiO3Radical Enhanced Atomic Layer Deposition of Metals and Oxides
576SrTiO3Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
577Ta2O5Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
578Ta2O5Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
579Ta2O5Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
580Ta2O5Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
581Ta2O5Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
582Ta2O5Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
583Ta2O5Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
584Ta2O5Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
585Ta2O5Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
586Ta2O5Trilayer Tunnel Selectors for Memristor Memory Cells
587TaZrO2Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications
588TiO2A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
589TiO2Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
590TiO2An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
591TiO2Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
592TiO2Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
593TiO2Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
594TiO2Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
595TiO2Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
596TiO2Band alignment of atomic layer deposited TiO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy
597TiO2Biofilm prevention on cochlear implants
598TiO2Bipolar resistive switching in amorphous titanium oxide thin film
599TiO2Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
600TiO2Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
601TiO2Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
602TiO2Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
603TiO2Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
604TiO2Effects of TiO2 Interfacial Atomic Layers on Device Performances and Exciton Dynamics in ZnO Nanorod Polymer Solar Cells
605TiO2Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
606TiO2Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
607TiO2Energy-enhanced atomic layer deposition for more process and precursor versatility
608TiO2Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
609TiO2Epitaxial 1D electron transport layers for high-performance perovskite solar cells
610TiO2Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
611TiO2Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
612TiO2Flexible Memristive Memory Array on Plastic Substrates
613TiO2Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO2 Scaffolds on Plastic Substrates
614TiO2Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
615TiO2Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
616TiO2Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
617TiO2High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
618TiO2High-efficiency embedded transmission grating
619TiO2Highly efficient and bending durable perovskite solar cells: toward a wearable power source
620TiO2Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
621TiO2Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination
622TiO2Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
623TiO2In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
624TiO2In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
625TiO2Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
626TiO2Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
627TiO2Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
628TiO2Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
629TiO2Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
630TiO2Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
631TiO2Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
632TiO2Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
633TiO2Low temperature temporal and spatial atomic layer deposition of TiO2 films
634TiO2Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
635TiO2Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
636TiO2Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
637TiO2Opportunities of Atomic Layer Deposition for Perovskite Solar Cells
638TiO2Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
639TiO2Oxygen migration in TiO2-based higher-k gate stacks
640TiO2Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
641TiO2Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
642TiO2Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
643TiO2Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
644TiO2Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications
645TiO2Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
646TiO2Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
647TiO2Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
648TiO2Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
649TiO2Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
650TiO2Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
651TiO2Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
652TiO2Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
653TiO2Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
654TiO2Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
655TiO2Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
656TiO2Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
657TiO2Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
658TiO2Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
659TiO2The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
660TiO2The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
661TiO2The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
662TiO2Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
663TiO2Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
664TiO2TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
665TiO2Transient characterization of the electroforming process in TiO2 based resistive switching devices
666TiO2Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
667TiO2X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect
668TiONNitrogen-Doping of Bulk and Nanotubular TiO2 Photocatalysts by Plasma-Assisted Atomic Layer Deposition
669TiP2O7Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
670TiSiOOptical and Electrical Properties of TixSi1-xOy Films
671TiTaOPreliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
672VOxAtomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
673VOxComparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
674VOxEvaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
675VOxTunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
676WO3Improvement of Gas-Sensing Performance of Large-Area Tungsten Disulfide Nanosheets by Surface Functionalization
677WO3Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
678WO3Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
679WO3The important role of water in growth of monolayer transition metal dichalcogenides
680Y2O3Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
681Y2O3Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
682Y2O3Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
683Y2O3Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition
684YSZAtomic layer deposition of ultrathin blocking layer for low-temperature solid oxide fuel cell on nanoporous substrate
685YSZEffect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte
686YSZEffects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
687YSZPlasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
688YSZSurface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte
689ZnOBand alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
690ZnOBipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
691ZnOComparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
692ZnOEffect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
693ZnOElectrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
694ZnOElectrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
695ZnOEmploying Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
696ZnOEnhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
697ZnOForming-free resistive switching of tunable ZnO films grown by atomic layer deposition
698ZnOGrowth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
699ZnOHighly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
700ZnOHysteresis behaviour of top-down fabricated ZnO nanowire transistors
701ZnOImproving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
702ZnOLow-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
703ZnOPhotochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
704ZnOPlasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
705ZnOPlasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
706ZnOPlasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
707ZnORadical Enhanced Atomic Layer Deposition of Metals and Oxides
708ZnORemote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
709ZnOSelf-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
710ZnOSpectroscopy and control of near-surface defects in conductive thin film ZnO
711ZnOStructural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
712ZnOTailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
713ZnOThe "Pure Marriage" between 3D Printing and Well-Ordered Nanoarrays by Using PEALD Assisted Hydrothermal Surface Engineering
714ZnOThe effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
715ZnOThe Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
716ZnOThe Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
717ZnOTop-down fabricated ZnO nanowire transistors for application in biosensors
718ZnOTuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
719ZnOWetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
720ZnPO4Plasma-enhanced atomic layer deposition of zinc phosphate
721ZnSnOGrowth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
722ZrO2Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
723ZrO2Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
724ZrO2Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
725ZrO2Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors
726ZrO2Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process
727ZrO2Double nitridation of crystalline ZrO2/Al2O3 buffer gate stack with high capacitance, low leakage and improved thermal stability
728ZrO2Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
729ZrO2Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
730ZrO2Enhancement of Electrical Characteristics and Reliability in Crystallized ZrO2 Gate Dielectrics Treated with In-Situ Atomic Layer Doping of Nitrogen
731ZrO2High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates
732ZrO2Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
733ZrO2Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
734ZrO2Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
735ZrO2Improvement of Capacitance Equivalent Thickness, Leakage Current, and Interfacial State Density Based on Crystallized High-K Dielectrics/Nitrided Buffer Layer Gate Stacks
736ZrO2Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
737ZrO2Low-Leakage Tetragonal ZrO2 (EOT < 1 nm) With In Situ Plasma Interfacial Passivation on Germanium
738ZrO2Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
739ZrO2PEALD grown high-k ZrO2 thin films on SiC group IV compound semiconductor
740ZrO2PEALD ZrO2 Films Deposition on TiN and Si Substrates
741ZrO2Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition
742ZrO2Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
743ZrO2Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
744ZrO2Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
745ZrO2Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure
746ZrO2Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications
747ZrO2The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
748ZrO2Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
749ZrO2Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors
750ZrO2ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
751ZrO2ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium
752ZrONEnhancement of Electrical Characteristics and Reliability in Crystallized ZrO2 Gate Dielectrics Treated with In-Situ Atomic Layer Doping of Nitrogen
753ZrONImpact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
754ZrONImproved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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