1 | Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant |
2 | Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection |
3 | Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material |
4 | Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy |
5 | Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN |
6 | Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films |
7 | Thermodynamic properties and interfacial layer characteristics of HfO2 thin films deposited by plasma-enhanced atomic layer deposition |
8 | Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process |
9 | Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition |
10 | Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells |
11 | Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers |
12 | Resistive switching properties of plasma enhanced-ALD La2O3 for novel nonvolatile memory application |
13 | Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights |
14 | Atomic layer deposition of stoichiometric In2O3 films using liquid ethylcyclopentadienyl indium and combinations of H2O and O2 plasma |
15 | Innovative remote plasma source for atomic layer deposition for GaN devices |
16 | Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications |
17 | Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p+ Regions |
18 | Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3 |
19 | Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc |
20 | Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition |
21 | Growth and characterization of aluminum oxide films by plasma-assisted atomic layer deposition |
22 | Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition |
23 | Organic narrowband near-infrared photodetectors based on intermolecular charge-transfer absorption |
24 | In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3 |
25 | Damage evaluation in graphene underlying atomic layer deposition dielectrics |
26 | Optical in situ monitoring of plasma-enhanced atomic layer deposition process |
27 | Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation |
28 | Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride |
29 | Development and Evaluation of a Nanometer-Scale Hemocompatible and Antithrombotic Coating Technology Platform for Commercial Intracranial Stents and Flow Diverters |
30 | Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition |
31 | Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode |
32 | Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3 |
33 | Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity |
34 | Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation |
35 | Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors |
36 | Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors |
37 | Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode |
38 | Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality |
39 | Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition |
40 | Characteristics of Thin Hf-Silicate Gate Dielectrics after Remote N2 and N2O Plasma Post-Treatments |
41 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |
42 | Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing |
43 | Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting |
44 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |
45 | Optical and Electrical Properties of TixSi1-xOy Films |
46 | Effect of Oxygen Source on the Various Properties of SnO2 Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition |
47 | Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition |
48 | Analog/RF Study of Self-aligned In0.53Ga0.47As MOSFET with Scaled Gate Length |
49 | Hafnia and alumina on sulphur passivated germanium |
50 | Electrical Characteristics of n, p-In0.53Ga0.47As MOSCAPs With In Situ PEALD-AlN Interfacial Passivation Layer |
51 | Effect of Thermal Annealing on La2O3 Films Grown by Plasma Enhanced Atomic Layer Deposition |
52 | Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas |
53 | Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition |
54 | Integration of microwave-annealed oxidation on germanium metal-oxide-semiconductor devices |
55 | Top-down fabrication of fluorine-doped tin oxide nanopillar substrates for solar water splitting |
56 | A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application |
57 | Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application |
58 | Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition |
59 | Comparisons of alumina barrier films deposited by thermal and plasma atomic layer deposition |
60 | Total-dose radiation response and and post-irradiation annealing response of Hafnium capacitors |
61 | Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD) |
62 | Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition |
63 | Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors |
64 | Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides |
65 | Tuning the phase transitions of VO2 thin films on silicon substrates using ultrathin Al2O3 as buffer layers |
66 | Flexible Memristive Memory Array on Plastic Substrates |
67 | Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3 |
68 | Plasma-enhanced atomic layer deposition of SiO2 for channel isolation of colloidal quantum dots phototransistors |
69 | Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies |
70 | Trilayer Tunnel Selectors for Memristor Memory Cells |
71 | Atomic layer deposition of YMnO3 thin films |
72 | Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition |
73 | Liquids on-chip: direct storage and release employing micro-perforated vapor barrier films |
74 | Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma |
75 | Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants |
76 | Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO3 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition |
77 | Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide |
78 | Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction |
79 | Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices |
80 | Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme |
81 | Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods |
82 | Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors |
83 | A New Hole Transport Material for Efficient Perovskite Solar Cells With Reduced Device Cost |
84 | Interfaces Formed by ALD Metal Oxide Growth on Metal Layers |
85 | Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy |
86 | Minority carrier lifetime limitations in Si wafer solar cells with gallium phosphide window layers |
87 | Room-Temperature Atomic Layer Deposition of Platinum |
88 | Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2 |
89 | Thermal and Plasma Enhanced Atomic Layer Deposition of Al2O3 on GaAs Substrates |
90 | Damage evaluation in graphene underlying atomic layer deposition dielectrics |
91 | Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems |
92 | Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity |
93 | Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials |
94 | An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD |
95 | Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications |
96 | Optical properties and bandgap evolution of ALD HfSiOx films |
97 | 46-2: Multi-Level-Pressure Touch Sensors with P(VDF-TrFE) Deposited on Metal Oxide Thin Film Transistor |
98 | Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD) |
99 | Top-down fabricated ZnO nanowire transistors for application in biosensors |
100 | A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD |
101 | In-system photoelectron spectroscopy study of tin oxide layers produced from tetrakis(dimethylamino)tin by plasma enhanced atomic layer deposition |
102 | Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method |
103 | Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition |
104 | Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures |
105 | The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO |
106 | Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition |
107 | Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon |
108 | Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation |
109 | Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride |
110 | Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights |
111 | Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface |
112 | The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges |
113 | Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films |
114 | TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films |
115 | Evaluation of Thermal Versus Plasma-Assisted ALD Al2O3 as Passivation for InAlN/AlN/GaN HEMTs |
116 | Surface and sensing properties of PE-ALD SnO2 thin film |
117 | Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition |
118 | Composite materials and nanoporous thin layers made by atomic layer deposition |
119 | Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition |
120 | In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides |
121 | Experimental verification of electro-refractive phase modulation in graphene |
122 | Wet Chemical Oxidation to Improve Interfacial Properties of Al2O3/Si and Interface Analysis of Al2O3/SiOx/Si Structure Using Surface Carrier Lifetime Simulation and Capacitance-Voltage Measurement |
123 | Ultrathin Surface Coating Enables the Stable Sodium Metal Anode |
124 | Advanced surface passivation of epitaxial boron emitters for high-efficiency ultrathin crystalline silicon solar cells |
125 | Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets |
126 | Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies |
127 | Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction |
128 | Simulation and Fabrication of HfO2 Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD |
129 | Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers |
130 | Investigating the interface characteristics of high-k ZrO2/SiO2 stacked gate insulator grown by plasma-enhanced atomic layer deposition for improving the performance of InSnZnO thin film transistors |
131 | Improvement of Capacitance Equivalent Thickness, Leakage Current, and Interfacial State Density Based on Crystallized High-K Dielectrics/Nitrided Buffer Layer Gate Stacks |
132 | Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy |
133 | Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries |
134 | Symmetrical Al2O3-based passivation layers for p- and n-type silicon |
135 | Improvement of Capacitance Equivalent Thickness, Leakage Current, and Interfacial State Density Based on Crystallized High-K Dielectrics/Nitrided Buffer Layer Gate Stacks |
136 | Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices |
137 | Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films |
138 | In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics |
139 | Unexpectedly High Minority-Carrier Lifetimes Exceeding 20 ms Measured on 1.4-Ohm cm n-Type Silicon Wafers |
140 | Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition |
141 | Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN |
142 | TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition |
143 | Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors |
144 | Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors |
145 | High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films |
146 | HfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer |
147 | The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films |
148 | Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments |
149 | Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry |
150 | Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition |
151 | Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx:H stacks |
152 | Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition |
153 | Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films |
154 | Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition |
155 | Effect of Buffer Layer for HfO2 Gate Dielectrics Grown by Remote Plasma Atomic Layer Deposition |
156 | Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application |
157 | Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides |
158 | Effects of Fluorine Plasma Treatment on the Electronic Structure of Plasma-Enhanced Atomic Layer Deposition HfO2 |
159 | Field-enhanced direct tunneling in ultrathin atomic-layer-deposition-grown Au-Al2O3-Cr metal-insulator-metal structures |
160 | Atomic layer deposited Al2O3 capping layer effect on environmentally assisted cracking in SiNx barrier films |
161 | Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries |
162 | Effect of annealing conditions on formation of SrRuO3 films by interfacial reaction of SrO/RuO2 bi-layer films |
163 | A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films |
164 | Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation |
165 | Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source |
166 | Distribution and coverage of 40 nm gold nano-particles on aluminum and hafnium oxide using electrophoretic method and fabricated MOS structures |
167 | Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISHFET |
168 | Plasma-Enhanced Atomic Layer Deposition of SrTa2O6 Thin Films Using Sr[Ta(OC2H5)5(OC2H4OCH3)]2 as Precursor |
169 | Band Offsets for Atomic Layer Deposited HfSiO4 on (Al0.14Ga0.86)2O3 |
170 | 'Zero-charge' SiO2/Al2O3 stacks for the simultaneous passivation of n+ and p+ doped silicon surfaces by atomic layer deposition |
171 | Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes |
172 | Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications |
173 | Hot Carrier Filtering in Solution Processed Heterostructures: A Paradigm for Improving Thermoelectric Efficiency |
174 | Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors |
175 | Improvement of Capacitance Equivalent Thickness, Leakage Current, and Interfacial State Density Based on Crystallized High-K Dielectrics/Nitrided Buffer Layer Gate Stacks |
176 | Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions |
177 | Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors |
178 | Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings |
179 | Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD |
180 | Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate |
181 | Breakdown and Protection of ALD Moisture Barrier Thin Films |
182 | Interfacial Self-Cleaning during PEALD HfO2 Process on GaAs Using TDMAH/O2 with Different (NH4)2S Cleaning Time |
183 | Fabrication of nanoporous membranes for tuning microbial interactions and biochemical reactions |
184 | The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides |
185 | Toward an integrated device for spatiotemporal superposition of free-electron lasers and laser pulses |
186 | RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma |
187 | Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries |
188 | Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4 |
189 | Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications |
190 | Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition |
191 | Terahertz Quantum Plasmonics of Nanoslot Antennas in Nonlinear Regime |
192 | Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics |
193 | Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition |
194 | Laminated Al2O3-HfO2 layers grown by atomic layer deposition for microelectronics applications |
195 | HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition |
196 | Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si |
197 | Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis |
198 | Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating |
199 | Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer |
200 | Aluminum oxide – n-Si field effect inversion layer solar cells with organic top contact |
201 | Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process |
202 | Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors |
203 | Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition |
204 | Effects of Fluorine Plasma Treatment on the Electronic Structure of Plasma-Enhanced Atomic Layer Deposition HfO2 |
205 | Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity |
206 | Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications |
207 | Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition |
208 | Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition |
209 | Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer |
210 | Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4 |
211 | Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth |
212 | Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma |
213 | Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films |
214 | TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition |
215 | Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings |
216 | Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy |
217 | Plasma-Enhanced Atomic-Layer Deposition of a HfO2 Gate Dielectric |
218 | Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights |
219 | Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD |
220 | Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films |
221 | Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films |
222 | Atomic Layer Deposition of Gold Metal |
223 | Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition |
224 | Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions |
225 | The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition |
226 | Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition |
227 | Nanochemistry, nanostructure, and electrical properties of Ta2O5 film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition |
228 | Multiscale modeling for SiO2 atomic layer deposition for high-aspect-ratio hole patterns |
229 | Tuning size and coverage of Pd nanoparticles using atomic layer deposition |
230 | Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates |
231 | On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR |
232 | Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition |
233 | Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing |
234 | Engineering Interfacial Silicon Dioxide for Improved Metal-Insulator-Semiconductor Silicon Photoanode Water Splitting Performance |
235 | Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy |
236 | Enhancement of reliability and stability for transparent amorphous indium-zinc-tin-oxide thin film transistors |
237 | Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method |
238 | A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition |
239 | On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies |
240 | Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study |
241 | Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays |
242 | Densification of Thin Aluminum Oxide Films by Thermal Treatments |
243 | Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks |
244 | Anti-stiction coating for mechanically tunable photonic crystal devices |
245 | Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation |
246 | HfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer |
247 | Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps |
248 | Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study |
249 | Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors |
250 | Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation |
251 | Interface effect on dielectric constant of HfO2/Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition |
252 | Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors |
253 | Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4 |
254 | Atomic layer deposition of high purity Ga2O3 films using liquid pentamethylcyclopentadienyl gallium and combinations of H2O and O2 plasma |
255 | Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights |
256 | High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition |
257 | Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors |
258 | Improvement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma |
259 | Energy dissipation during pulsed switching of strontium-titanate based resistive switching memory devices |
260 | Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films |
261 | Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants |
262 | Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization |
263 | Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes |
264 | Efficient and Sustained Photoelectrochemical Water Oxidation by Cobalt Oxide/Silicon Photoanodes with Nanotextured Interfaces |
265 | Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2 |
266 | The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films |
267 | Area-Selective Atomic Layer Deposition of In2O3:H Using a µ-Plasma Printer for Local Area Activation |
268 | Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition |
269 | Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions |
270 | Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition |
271 | Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy |
272 | Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range |
273 | ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium |
274 | Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection |
275 | Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide |
276 | Influence of oxidant source on the property of atomic layer deposited Al2O3 on hydrogen-terminated Si substrate |
277 | Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma |
278 | Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4 |
279 | Selective composition modification deposition utilizing ion bombardment-induced interfacial mixing during plasma-enhanced atomic layer deposition |
280 | Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides |
281 | Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices |
282 | Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings |
283 | Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source |
284 | Kinetics of the permanent deactivation of the boron-oxygen complex in crystalline silicon as a function of illumination intensity |
285 | A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition |
286 | Advances in the fabrication of graphene transistors on flexible substrates |
287 | ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition |
288 | An ultra-thin SiO2 ALD layer for void-free bonding of III-V material on silicon |
289 | Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer |
290 | Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition |
291 | Comparative study of ALD SiO2 thin films for optical applications |
292 | In situ x-ray photoelectron emission analysis of the thermal stability of atomic layer deposited WOx as hole-selective contacts for Si solar cells |
293 | Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition |
294 | Electrical characterization of the slow boron oxygen defect component in Czochralski silicon |
295 | Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides |
296 | Remote Plasma ALD of Platinum and Platinum Oxide Films |
297 | Spectral analysis of sidewall roughness during resist-core self-aligned double patterning integration |
298 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |
299 | Method of Fabrication for Encapsulated Polarizing Resonant Gratings |
300 | Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils |
301 | Photoluminescence and electroluminescence from Ge/strained GeSn/Ge quantum wells |
302 | Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth |
303 | Atomic layer deposited silicon dioxide films on nanomechanical silicon nitride resonators |
304 | Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen |
305 | Residual stress study of thin films deposited by atomic layer deposition |
306 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |
307 | Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage |
308 | Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition |
309 | Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition |
310 | Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition |
311 | Charge effects of ultrafine FET with nanodot type floating gate |
312 | Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications |
313 | HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition |
314 | Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition |
315 | Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniques |
316 | Propagation Effects in Carbon Nanoelectronics |
317 | Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers |
318 | Energy-enhanced atomic layer deposition for more process and precursor versatility |
319 | Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study |
320 | Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications |
321 | Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric |
322 | Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application |
323 | The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain |
324 | Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement |
325 | Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition |
326 | Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition |
327 | Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition |
328 | Large area, patterned growth of 2D MoS2 and lateral MoS2-WS2 heterostructures for nano- and opto-electronic applications |
329 | Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice |
330 | Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition |
331 | Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy |
332 | Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs |
333 | Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes |
334 | High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films |
335 | Thickness and Morphology Dependent Electrical Properties of ALD-Synthesized MoS2 FETs |
336 | ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications |
337 | Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2 |
338 | Characteristics of remote plasma atomic layer-deposited HfO2 films on O2 and N2 plasma-pretreated Si substrates |
339 | Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors |
340 | Understanding the Oxygen Evolution Reaction Mechanism on CoOx using Operando Ambient-Pressure X-ray Photoelectron Spectroscopy |
341 | Effects of rapid thermal annealing on the properties of HfO2/La2O3 nanolaminate films deposited by plasma enhanced atomic layer deposition |
342 | Plasma-Enhanced Atomic Layer Deposition of Ultrathin Oxide Coatings for Stabilized Lithium-Sulfur Batteries |
343 | Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma |
344 | Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device |
345 | Injection dependence of the effective lifetime of n-type Si passivated by Al2O3: An edge effect? |
346 | Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas |
347 | Corrosion barriers for silver-based telescope mirrors: comparative study of plasma-enhanced atomic layer deposition and reactive evaporation of aluminum oxide |
348 | Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma |
349 | Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth |
350 | The size effect of titania-supported Pt nanoparticles on the electrocatalytic activity towards methanol oxidation reaction primarily via the bifunctional mechanism |
351 | Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films |
352 | Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition |
353 | Investigation of field-effect passivation and interface state parameters at the Al2O3/Si interface |
354 | Index matching at the nanoscale: light scattering by core-shell Si/SiOx nanowires |
355 | Atomic layer deposition of ferroelectric Hf0.5Zr0.5O2 on single-layer, CVD-grown graphene |
356 | Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials |
357 | Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing |
358 | Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition |
359 | Interfacial Layer Properties of HfO2 Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon |
360 | Enhancement of Electrical Characteristics and Reliability in Crystallized ZrO2 Gate Dielectrics Treated with In-Situ Atomic Layer Doping of Nitrogen |
361 | Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition |
362 | Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions |
363 | Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate |
364 | Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation |
365 | Annealing Effects on the Band Alignment of ALD SiO2 on (InxGa1-x)2O3 for x = 0.25-0.74 |
366 | Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides |
367 | High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds |
368 | Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO2 and β-Ga2O3 (2̅01) |
369 | Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2 |
370 | Optical properties and bandgap evolution of ALD HfSiOx films |
371 | Advanced thin gas barriers film incorporating alternating structure of PEALD-based Al2O3/organic-inorganic nanohybrid layers |
372 | Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides |
373 | Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells |
374 | Effect of hydrogen participation on the improvement in electrical characteristics of HfO2 gate dielectrics by post-deposition remote N2 , N2/H2, and NH3 plasma treatments |
375 | Oxidation precursor dependence of atomic layer deposited Al2O3 films in a-Si:H(i)/Al2O3 surface passivation stacks |
376 | Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers |
377 | Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide |
378 | Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries |
379 | A Microwave Driven PE-ALD for Ultrathin Al2O3/ZnO Synthesis over Perovskite Layer |
380 | Enhanced interfacial reaction of precursor and low temperature substrate in HfO2 atomic layer deposition with highly Ar diluted O2 plasma |
381 | Effect of Hydrogen in Gate Insulator on NBIS Performance of Oxide Thin Film Transistor |
382 | Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications |
383 | Oxygen migration in TiO2-based higher-k gate stacks |
384 | Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection |
385 | Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source |
386 | Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper |
387 | High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition |
388 | Enhancement of Electrical Characteristics and Reliability in Crystallized ZrO2 Gate Dielectrics Treated with In-Situ Atomic Layer Doping of Nitrogen |
389 | A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD |
390 | Stretchable Carbon Nanotube Charge-Trap Floating-Gate Memory and Logic Devices for Wearable Electronics |
391 | Impurity Gettering by Atomic-Layer-Deposited Aluminium Oxide Films on Silicon at Contact Firing Temperatures |
392 | Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices |
393 | Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties |
394 | Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition |
395 | Low-bandgap mixed tin-lead iodide perovskite absorbers with long carrier lifetimes for all-perovskite tandem solar cells |
396 | Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application |
397 | Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure |
398 | Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition |
399 | Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries |
400 | Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage |
401 | Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4 |
402 | Threshold voltage controlled by gate area and gate recess in inverted trapezoidal trigate AlGaN/GaN MOS high-electron-mobility transistors with photoenhanced chemical and plasma-enhanced atomic layer deposition oxides |
403 | Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma |
404 | Improvement of Gas-Sensing Performance of Large-Area Tungsten Disulfide Nanosheets by Surface Functionalization |
405 | Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies |
406 | Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition |
407 | A multifunctional biphasic water splitting catalyst tailored for integration with high-performance semiconductor photoanodes |
408 | Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2 |
409 | Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance |
410 | Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications |
411 | Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method |
412 | Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process |
413 | Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition |
414 | Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy |
415 | Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition |
416 | Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition |
417 | Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes |
418 | Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices |
419 | Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma |
420 | Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution |
421 | Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C |
422 | Influence of infrared radiation on the electrical characteristics of the surface-barrier nanostructures based on MBE HgCdTe |
423 | Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition |
424 | Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films |
425 | Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition |
426 | Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition |
427 | Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition |
428 | Atomic structure of conducting nanofilaments in TiO2 resistive switching memory |
429 | In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides |
430 | Field-Plated Ga2O3 MOSFETs With a Breakdown Voltage of Over 750 V |
431 | High-Reflective Coatings For Ground and Space Based Applications |
432 | Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride |
433 | Electrical Properties of Alumina Films by Plasma-Enhanced Atomic Layer Deposition |
434 | Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films |
435 | Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3 |
436 | Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma |
437 | Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties |
438 | Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells |
439 | Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions |
440 | Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition |
441 | Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2 |
442 | Optical and electrical properties of Al:WS2 films prepared by atomic layer deposition and vulcanization |
443 | Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms |
444 | Remote Plasma Atomic Layer Deposition of HfO2 Thin Films Using the Alkoxide Precursor Hf(mp)4 |
445 | Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier |
446 | Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions |
447 | Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment |
448 | Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement |
449 | Characteristics of Metal-Oxide-Semiconductor Field-Effect Transistors with HfO2/SiO2/Si and HfO2/SiOxNy/Si Stack Structures Formed by Remote Plasma Technique |
450 | An improvement of HfO2/Ge interface by in situ remote N2 plasma pretreatment for Ge MOS devices |
451 | Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries |
452 | Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics |
453 | Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source |
454 | Evaluating the Impact of Thermal Annealing on Al2O3/c-Si Interface Properties by Non-Destructive Measurements |
455 | Nanoscopic structural rearrangements of the Cu-filament in conductive-bridge memories |
456 | Vertical Ge and GeSn heterojunction gate-all-around tunneling field effect transistors |
457 | Plasma enhanced atomic layer deposition of Fe2O3 thin films |
458 | Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features |
459 | Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte |
460 | Photoluminescence and electroluminescence from Ge/strained GeSn/Ge quantum wells |
461 | Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure |
462 | Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions |
463 | Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET |
464 | Thermal Stability of Novel Hole-Selective Contacts for Silicon Wafer Solar Cells |
465 | Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition |
466 | In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides |
467 | The important role of water in growth of monolayer transition metal dichalcogenides |
468 | Improving Thermal Stability and Interface State Density of High-k Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium |
469 | Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte |
470 | Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides |
471 | Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition |
472 | Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors |
473 | Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics |
474 | Plasma-Assisted Atomic Layer Deposition of Al2O3 at Room Temperature |
475 | DFT modeling of plasma-assisted atomic layer deposition for Si(110) passivation: formation of boehmite-like chains as γ-Al2O3 precursors |
476 | Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers |
477 | PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads |
478 | Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition |
479 | Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor |
480 | Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN |
481 | Characterizations of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition |
482 | Enhancement-mode AlGaN/GaN MIS-HEMTs with low threshold voltage hysteresis using damage-free neutral beam etched gate recess |
483 | Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties |
484 | Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition |
485 | Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material |
486 | Effects of N2 remote plasma nitridation on the structural and electrical characteristics of the HfO2 gate dielectrics grown using remote plasma atomic layer deposition methods |
487 | The "Pure Marriage" between 3D Printing and Well-Ordered Nanoarrays by Using PEALD Assisted Hydrothermal Surface Engineering |
488 | Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films |
489 | Plasma-Enhanced Atomic Layer Deposition of p-Type Copper Oxide Semiconductors with Tunable Phase, Oxidation State, and Morphology |
490 | Encapsulation method for atom probe tomography analysis of nanoparticles |
491 | Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction |
492 | Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface |
493 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |
494 | Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN |
495 | Thermal Stability of ALD HfO2 Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma |
496 | Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma |
497 | Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition |
498 | Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories |
499 | Photovoltaic Rudorffites: Lead-Free Silver Bismuth Halides Alternative to Hybrid Lead Halide Perovskites |
500 | Hydrophilic/hydrophobic surface of Al2O3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC) |
501 | Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry |
502 | On the equilibrium concentration of boron-oxygen defects in crystalline silicon |
503 | Residual stress study of thin films deposited by atomic layer deposition |
504 | On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies |
505 | Atomic layer deposited HfO2/HfSixOyNz stacked gate dielectrics for metal-oxide-semiconductor structures |
506 | High-efficiency embedded transmission grating |
507 | Effects of N2 RPN on the Structural and Electrical Characteristics of Remote Plasma Atomic Layer-Deposited HfO2 Films |
508 | Plasma-enhanced atomic layer deposition of silicon dioxide films using plasma-activated triisopropylsilane as a precursor |
509 | Radical Enhanced Atomic Layer Deposition of Titanium Dioxide |
510 | Highly efficient and bending durable perovskite solar cells: toward a wearable power source |
511 | In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd |
512 | Effects of rapid thermal annealing on the properties of HfO2/La2O3 nanolaminate films deposited by plasma enhanced atomic layer deposition |
513 | Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition |
514 | Spectroscopy and control of near-surface defects in conductive thin film ZnO |
515 | Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition |
516 | Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides |
517 | Plasma-Enhanced Atomic Layer Deposition of Al2O3 on Graphene Using Monolayer hBN as Interfacial Layer |
518 | Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation |
519 | Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al2O3 and Parylene C for Biomedical Implantable Devices |
520 | Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films |
521 | Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions |
522 | Influence of Surface Temperature on the Mechanism of Atomic Layer Deposition of Aluminum Oxide Using an Oxygen Plasma and Ozone |
523 | Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition |
524 | Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth |
525 | Integrated Semiconductor/Catalyst Assemblies for Sustained Photoanodic Water Oxidation |
526 | On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes |
527 | Effect of Deposition Method on Valence Band Offsets of SiO2 and Al2O3 on (Al0.14Ga0.86)2O3 |
528 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |
529 | Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors |
530 | Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System |
531 | Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films |
532 | Alloyed 2D Metal-Semiconductor Atomic Layer Junctions |
533 | Suppression of GeOx interfacial layer and enhancement of the electrical performance of the high-K gate stack by the atomic-layer-deposited AlN buffer layer on Ge metal-oxide-semiconductor devices |
534 | A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density |
535 | Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy |
536 | Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene |
537 | Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2 |
538 | Using top graphene layer as sacrificial protection during dielectric atomic layer deposition |
539 | Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors |
540 | Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection |
541 | Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition |
542 | Normally-off AlGaN/GaN recessed MOS-HEMTs on normally-on epitaxial structures for microwave power applications |
543 | The effect of atomic layer deposition temperature on switching properties of HfOx resistive RAM devices |
544 | The Influence of Technology and Switching Parameters on Resistive Switching Behavior of Pt/HfO2/TiN MIM Structures |
545 | 'Zero-charge' SiO2/Al2O3 stacks for the simultaneous passivation of n+ and p+ doped silicon surfaces by atomic layer deposition |
546 | Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition |
547 | Plasma-enhanced atomic layer deposition of BaTiO3 |
548 | Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2 |
549 | Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition |
550 | Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting |
551 | Correlation between SiO2 growth rate and difference in electronegativity of metal-oxide underlayers for plasma enhanced atomic layer deposition using tris(dimethylamino)silane precursor |
552 | Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide |
553 | Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition |
554 | Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy |
555 | Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy |
556 | Optical properties and bandgap evolution of ALD HfSiOx films |
557 | Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma |
558 | Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure |
559 | High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating |
560 | Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches |
561 | Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers |
562 | Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric |
563 | Gate-tunable high mobility remote-doped InSb/In1-xAlxSb quantum well heterostructures |
564 | MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion |
565 | ZrO2 Gate Dielectric Deposited by Plasma-Enhanced Atomic Layer Deposition Method |
566 | Optimization of the Surface Structure on Black Silicon for Surface Passivation |
567 | Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects |
568 | 3D structure evolution using metastable atomic layer deposition based on planar silver templates |
569 | Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature |
570 | Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma |
571 | Biofilm prevention on cochlear implants |
572 | Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode |
573 | Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition |
574 | Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops |
575 | Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide |
576 | Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide |
577 | Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries |
578 | Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices |
579 | Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition |
580 | Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy |
581 | Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode |
582 | Properties of HfAlO film deposited by plasma enhanced atomic layer deposition |
583 | Dynamic tuning of plasmon resonance in the visible using graphene |
584 | Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer |
585 | Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition |
586 | Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting |
587 | Incorporating Yttrium into a GeO Interfacial Layer with HfO2-Based Gate Stack on Ge |
588 | Bottom-up plasma-enhanced atomic layer deposition of SiO2 by utilizing growth inhibition using NH3 plasma pre-treatment for seamless gap-fill process |
589 | Nanotextured surfaces for surface enhanced Raman spectroscopy and sensors |
590 | Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces |
591 | Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions |
592 | Deposition and Plasma Measurements of Zr-Oxide Films with Low Impurity Concentrations by Remote PEALD |
593 | Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films |
594 | Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition |
595 | Role of Metal Contacts in Designing High-Performance Monolayer n-Type WSe2 Field Effect Transistors |
596 | Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation |
597 | A sub-1-volt analog metal oxide memristive-based synaptic device with large conductance change for energy-efficient spike-based computing systems |
598 | Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation |
599 | In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices |
600 | Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions |
601 | Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition |
602 | Lithium-Iron (III) Fluoride Battery with Double Surface Protection |
603 | Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method |
604 | Incorporating Yttrium into a GeO Interfacial Layer with HfO2-Based Gate Stack on Ge |
605 | Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon |
606 | Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2 |
607 | Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma |
608 | Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate |
609 | Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3 |
610 | Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity |
611 | High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates |
612 | High-efficiency embedded transmission grating |
613 | Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3 |
614 | Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition |
615 | Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers |
616 | Localized defect states and charge trapping in atomic layer deposited-Al2O3 films |
617 | Toward reliable MIS- and MOS-gate structures for GaN lateral power devices |
618 | Plasma enhanced atomic layer deposition of Ga2O3 thin films |
619 | Atomic layer deposited HfO2/HfSixOyNz stacked gate dielectrics for metal-oxide-semiconductor structures |
620 | Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films |
621 | Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System |
622 | Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride |
623 | Improved film quality of plasma enhanced atomic layer deposition SiO2 using plasma treatment cycle |
624 | On the role of nanoporosity in controlling the performance of moisture permeation barrier layers |
625 | TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition |
626 | Growth of Bi2O3 Films by Thermal- and Plasma-Enhanced Atomic Layer Deposition Monitored with Real-Time Spectroscopic Ellipsometry for Photocatalytic Water Splitting |
627 | Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties |
628 | Band alignment of atomic layer deposited TiO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy |
629 | Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide |
630 | Characteristics of TiO2 Films Prepared by ALD With and Without Plasma |
631 | Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches |
632 | Electron-selective contacts via ultra-thin organic interface dipoles for silicon organic heterojunction solar cells |
633 | Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition |
634 | Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor |
635 | Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition |
636 | The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges |
637 | AlGaN/GaN MIS-HEMT gate structure improvement using Al2O3 deposited by plasma-enhanced ALD |
638 | Study on deposition of Al2O3 films by plasma-assisted atomic layer with different plasma sources |
639 | Opportunities of Atomic Layer Deposition for Perovskite Solar Cells |
640 | ALD Protection of Li-Metal Anode Surfaces - Quantifying and Preventing Chemical and Electrochemical Corrosion in Organic Solvent |
641 | Junctionless Gate-All-Around pFETs Using In-situ Boron-Doped Ge Channel on Si |
642 | Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer |
643 | Multi-functional touch sensors with strained P(VDF-TrFE) deposited on metal oxide thin film transistor |
644 | Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma |
645 | Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition |
646 | Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure |
647 | Development and characterization of an atmospheric pressure plasma reactor compatible with spatial ALD |
648 | Characterization of hafnium oxide resistive memory layers deposited on copper by atomic layer deposition |
649 | Effect of annealing conditions on formation of SrRuO3 films by interfacial reaction of SrO/RuO2 bi-layer films |
650 | X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect |
651 | Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells |
652 | Impact of interface materials on side permeation in indirect encapsulation of organic electronics |
653 | Stability of effective lifetime of float-zone silicon wafers with AlOx surface passivation schemes under illumination at elevated temperature |
654 | Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study |
655 | Interrogation of Electrochemical Properties of Polymer Electrolyte Thin Films with Interdigitated Electrodes |
656 | Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition |
657 | Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment |
658 | Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode |
659 | Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition |
660 | Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition |
661 | Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma |
662 | Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction |
663 | Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation |
664 | Excellent surface passivation of crystalline silicon by ternary AlxMg1-xOy thin films |
665 | Interfaces Formed by ALD Metal Oxide Growth on Metal Layers |
666 | Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition |
667 | Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3 |
668 | Investigating the interface characteristics of high-k ZrO2/SiO2 stacked gate insulator grown by plasma-enhanced atomic layer deposition for improving the performance of InSnZnO thin film transistors |
669 | Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3 |
670 | Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors |
671 | Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices |
672 | Long period gratings coated with hafnium oxide by plasma-enhanced atomic layer deposition for refractive index measurements |
673 | All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process |
674 | Breakdown and Protection of ALD Moisture Barrier Thin Films |
675 | Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement |
676 | Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study |
677 | A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition |
678 | Very high frequency plasma reactant for atomic layer deposition |
679 | Realistic efficiency potential of next-generation industrial Czochralski-grown silicon solar cells after deactivation of the boron-oxygen-related defect center |
680 | Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD |
681 | Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic |
682 | Tuning the Ge(Sn) Tunneling FET: Influence of Drain Doping, Short Channel, and Sn Content |
683 | Improved understanding of recombination at the Si/Al2O3 interface |
684 | Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor |
685 | Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants |
686 | Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction |
687 | The effects of layering in ferroelectric Si-doped HfO2 thin films |
688 | Liquid-Phase Crystallized Silicon Solar Cells on Glass: Increasing the Open-Circuit Voltage by Optimized Interlayers for n- and p-Type Absorbers |
689 | Simple silicon solar cells featuring an a-Si:H enhanced rear MIS contact |
690 | Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2 |
691 | Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition |
692 | Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films |
693 | Cost-effective hole transporting material for stable and efficient perovskite solar cells with fill factors up to 82% |
694 | Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process |
695 | Atomic scale nitrogen depth profile control during plasma enhanced atomic layer deposition of high k dielectrics |
696 | Composition, structure, and electrical characteristics of HfO2 gate dielectrics grown using the remote- and direct-plasma atomic layer deposition methods |
697 | Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents |
698 | Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition |
699 | Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition |
700 | Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions |
701 | Coupled used of SKP and C-V measurements to highlight the charge distribution and behavior in the Si/SiO2/Al2O3 stack for silicon solar cells surface passivation |
702 | Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition |
703 | Nanolaminated Al2O3/HfO2 dielectrics for silicon carbide based devices |
704 | Enhanced surface passivation of epitaxially grown emitters for high-efficiency ultrathin crystalline Si solar cells |
705 | Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition |
706 | Epitaxial 1D electron transport layers for high-performance perovskite solar cells |
707 | Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering |
708 | Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD |
709 | Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method |
710 | Self-aligned tip deinsulation of atomic layer deposited Al2O3 and parylene C coated Utah electrode array based neural interfaces |
711 | AlGaN/GaN MIS-HEMT Gate Structure Improvement Using Al2O3 Deposited by PEALD |
712 | Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor |
713 | Electrical characterization and reliability analysis of Al2O3/AlGaN/GaN MISH structure |
714 | Band alignment of atomic layer deposited SiO2 on (010) (Al0.14Ga0.86)2O3 |
715 | Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries |
716 | Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks |
717 | Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation |
718 | Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells |
719 | The Cut-Off Phenomenon Effect on ZrO2 Growth Using Remote Plasma-Enhanced Atomic Layer Deposition |
720 | Bipolar resistive switching in amorphous titanium oxide thin film |
721 | Distribution and coverage of 40 nm gold nano-particles on aluminum and hafnium oxide using electrophoretic method and fabricated MOS structures |
722 | Increment of dielectric properties of SrTiO3 thin films by SrO interlayer on Ru bottom electrodes |
723 | Modal properties of a strip-loaded horizontal slot waveguide |
724 | Photocatalytic Properties of Co3O4-Coated TiO2 Powders Prepared by Plasma-Enhanced Atomic Layer Deposition |
725 | Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings |
726 | Growth of rutile-TiO2 thin films via Sn doping and insertion of ultra-thin SnO2 interlayer by atomic layer deposition |
727 | Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon |
728 | Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma |
729 | Ultrasensitive Detection of 2,4-Dinitrophenol Using Nanowire Biosensor |
730 | Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics |
731 | Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD |
732 | Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy |
733 | Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating |
734 | Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition |
735 | Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer |
736 | Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO2 Thin Films via Atomic Layer Deposition |
737 | Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3 |
738 | Effect of Buffer Layer for HfO2 Gate Dielectrics Grown by Remote Plasma Atomic Layer Deposition |
739 | Ion energy control during plasma-enhanced atomic layer deposition: enabling materials control and selective processing in the third dimension |
740 | A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects |
741 | Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques |
742 | PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen |
743 | Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2 |
744 | Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface |
745 | Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition |
746 | The reaction pathways of the oxygen plasma pulse in the hafnium oxide atomic layer deposition process |
747 | Gate Insulator for High Mobility Oxide TFT |
748 | Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering |
749 | Capacitance-voltage characterization of Al2O3/GaN-on-insulator (GaNOI) structures with TMAH surface treatment |
750 | Epitaxially grown crystalline Al2O3 interlayer on β-Ga2O3 (010) and its suppressed interface state density |
751 | Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors |
752 | Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing |
753 | Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges |
754 | Investigation of Atomic Layer Deposition Al2O3 Passivation for Screen-Printed Large-Area Solar Cells |
755 | Growth of rutile-TiO2 thin films via Sn doping and insertion of ultra-thin SnO2 interlayer by atomic layer deposition |
756 | Highly stable all-inorganic CsPbBr3 nanocrystals film encapsulated with alumina by plasma-enhanced atomic layer deposition |
757 | ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition |
758 | Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process |
759 | Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition |
760 | Fixed-Gap Tunnel Junction for Reading DNA Nucleotides |
761 | Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition |
762 | Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching |
763 | Characteristics of HfO2 thin films grown by plasma atomic layer deposition |
764 | Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries |
765 | Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth |
766 | Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy |
767 | Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers |
768 | Characterization of CVD graphene permittivity and conductivity in micro-/millimeter wave frequency range |
769 | Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications |
770 | Plasma assisted atomic layer deposited hafnium oxide films for silicon surface passivation |
771 | Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors |
772 | Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system |
773 | Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells |
774 | Transient characterization of the electroforming process in TiO2 based resistive switching devices |
775 | All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process |
776 | Interfacial, Electrical, and Band Alignment Characteristics of HfO2/Ge Stacks with In Situ-Formed SiO2 Interlayer by Plasma-Enhanced Atomic Layer Deposition |
777 | High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal-Organic Silicon Precursor and Oxygen Radical |
778 | Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition |
779 | Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity |
780 | Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications |
781 | Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2 |
782 | Characteristics of Thin Hf-Silicate Gate Dielectrics after Remote N2 and N2O Plasma Post-Treatments |
783 | Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films |
784 | Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics |
785 | Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor |
786 | Trapped charge densities in Al2O3-based silicon surface passivation layers |
787 | Nanolaminated Al2O3/HfO2 dielectrics for silicon carbide based devices |
788 | Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3 |
789 | Surface-enhanced gallium arsenide photonic resonator with a quality factor of six million |
790 | Low-frequency dielectric properties of intrinsic and Al-doped rutile TiO2 thin films grown by the atomic layer deposition technique |
791 | Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2 |
792 | Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition |
793 | Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries |
794 | The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition |
795 | Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals |
796 | Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation |
797 | Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films |
798 | Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques |
799 | Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors |
800 | Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide |
801 | Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer |
802 | Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells |
803 | Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films |
804 | Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films |
805 | Hysteresis behaviour of top-down fabricated ZnO nanowire transistors |
806 | Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2 |
807 | Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition |
808 | Multiplexed actuation using ultra dielectrophoresis for proteomics applications: a comprehensive electrical and electrothermal design methodology |
809 | Plasma-enhanced atomic layer deposition of BaTiO3 |
810 | Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors |
811 | On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR |
812 | Mechanical properties of thin-film Parylene-metal-Parylene devices |
813 | Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation |
814 | Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices |
815 | Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene |
816 | Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation |
817 | Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition |
818 | Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition |
819 | Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition |
820 | Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4 |
821 | Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma |
822 | Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition |
823 | Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device |
824 | Improving Thermal Stability and Interface State Density of High-k Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium |
825 | PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases |
826 | Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition |
827 | Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering |
828 | Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms |
829 | Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition |
830 | Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films |
831 | Optical display film as flexible and light trapping substrate for organic photovoltaics |
832 | Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films |
833 | Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition |
834 | Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma |
835 | In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition |
836 | Low-Leakage Tetragonal ZrO2 (EOT < 1 nm) With In Situ Plasma Interfacial Passivation on Germanium |
837 | Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating |
838 | Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer |
839 | Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si |
840 | Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber |
841 | Band alignment of Al2O3 with (-201) β-Ga2O3 |
842 | Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition |
843 | Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks |
844 | Effect of Buffer Layer for HfO2 Gate Dielectrics Grown by Remote Plasma Atomic Layer Deposition |
845 | Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration |
846 | Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity |
847 | Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices |
848 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |
849 | Characteristics of the HfO2 Thin Films Grown by Remote Plasma Atomic Layer Deposition Method on the Plasma Oxidized Si Substrate |
850 | Antireflection Coating on PMMA Substrates by Atomic Layer Deposition |
851 | Growth of rutile-TiO2 thin films via Sn doping and insertion of ultra-thin SnO2 interlayer by atomic layer deposition |
852 | Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO2 Scaffolds on Plastic Substrates |
853 | Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle |
854 | The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridation |
855 | Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition |
856 | Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2: Impact on the growth per cycle and wet etch rate |
857 | Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics |
858 | Interface effect on dielectric constant of HfO2/Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition |
859 | Topographical selective deposition: A comparison between plasma-enhanced atomic layer deposition/sputtering and plasma-enhanced atomic layer deposition/quasi-atomic layer etching approaches |
860 | Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals |
861 | Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing |
862 | Lytic enzymes as selectivity means for label-free, microfluidic and impedimetric detection of whole-cell bacteria using ALD-Al2O3 passivated microelectrodes |
863 | Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses |
864 | Electrically Excited Plasmonic Nanoruler for Biomolecule Detection |
865 | The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridation |
866 | High Performance and Low power Monolithic Three-Dimensional Sub-50 nm Poly Si Thin film transistor (TFTs) Circuits |
867 | Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition |
868 | Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD |
869 | Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films |
870 | Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition |
871 | Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3 |
872 | New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell |
873 | Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2 |
874 | On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies |
875 | Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition |
876 | Annealing behavior of ferroelectric Si-doped HfO2 thin films |
877 | Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier |
878 | Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications |
879 | Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides |
880 | Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition |
881 | Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides |
882 | Electrical Measurement Under Atmospheric Conditons of PbSe Nanocrystal Thin Films Passivated by Remote Plasma Atomic Layer Deposition of Al2O3 |
883 | Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes |
884 | Low temperature temporal and spatial atomic layer deposition of TiO2 films |
885 | Characteristics of HfO2 thin films deposited by plasma-enhanced atomic layer deposition using O2 plasma and N2O plasma |
886 | Stabilization of Al2O3 gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment |
887 | In situ plasma enhanced atomic layer deposition half cycle study of Al2O3 on AlGaN/GaN high electron mobility transistors |
888 | Growth, physical and electrical characterization of nickel oxide thin films prepared by plasma-enhanced atomic layer deposition using nickelocene and oxygen precursors |
889 | Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure |
890 | Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films |
891 | Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition |
892 | Ultraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition |
893 | Internal Photoemission Spectroscopy Measurements of the Energy Barrier Heights between ALD SiO2 and Ta-Based Amorphous Metals |
894 | Improvement of interfacial and electrical properties of Al2O3/n-Ga0.47In0.53As for III-V impact ionization MOSFETs |
895 | Capacitance spectroscopy of gate-defined electronic lattices |
896 | Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications |
897 | Electrical and chemical characterization of Al2O3 passivation layer deposited by plasma-assisted atomic layer deposition in c-Si solar cells |
898 | Investigation and optimization of HfO2 gate dielectric on N-polar GaN: Impact of surface treatments, deposition, and annealing conditions |
899 | Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films |
900 | α-Ga2O3 grown by low temperature atomic layer deposition on sapphire |
901 | Single-Cell Photonic Nanocavity Probes |
902 | Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C |
903 | Simultaneous scanning tunneling microscopy and synchrotron X-ray measurements in a gas environment |
904 | Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells |
905 | Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops |
906 | Atomic scale nitrogen depth profile control during plasma enhanced atomic layer deposition of high k dielectrics |
907 | Growth characteristics and film properties of plasma-enhanced and thermal atomic-layer-deposited magnesium oxide thin films prepared using bis(ethylcyclopentadienyl)magnesium precursor |
908 | Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor |
909 | Improvement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma |
910 | Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films |
911 | Chemical Protection of Polycarbonate Surfaces by Atomic Layer Deposition of Alumina with Oxygen Plasma Pretreatment |
912 | Atomic layer deposition of Co3O4 on carbon nanotubes/carbon cloth for high-capacitance and ultrastable supercapacitor electrode |
913 | Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges |
914 | Passivation of organic light-emitting diodes with aluminum oxide thin films grown by plasma-enhanced atomic layer deposition |
915 | Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition |
916 | Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties |
917 | Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study |
918 | Enhancement of mobility in ultra-thin-body GeOI p-channel metal-oxide-semiconductor field effect transistors with Si-passivated back interfaces |
919 | Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films |
920 | Energy-enhanced atomic layer deposition for more process and precursor versatility |
921 | Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides |
922 | Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer |
923 | Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy |
924 | Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries |
925 | Al2O3/TiO2 Nanolaminate Thin Film Encapsulation for Organic Thin Film Transistors via Plasma-Enhanced Atomic Layer Deposition |
926 | Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3 |
927 | Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon |
928 | Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition |
929 | Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations |
930 | Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications |
931 | The Effects of Annealing Ambient on the Characteristics of La2O3 Films Deposited by RPALD |
932 | DC characteristics of ALD-grown Al2O3/AlGaN/GaN MIS-HEMTs and HEMTs at 600°C in air |
933 | Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure |
934 | N-doped TiO2 nanotubes coated with a thin TaOxNy layer for photoelectrochemical water splitting: dual bulk and surface modification of photoanodes |
935 | Influence of plasma parameters on the properties of ultrathin Al2O3 films prepared by plasma enhanced atomic layer deposition below 100C for moisture barrier applications |
936 | Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films |
937 | Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure |
938 | Influence of the charge trap density distribution in a gate insulator on the positive-bias stress instability of amorphous indium-gallium-zinc oxide thin-film transistors |
939 | A PEALD Tunnel Dielectric for Three-Dimensional Non-Volatile Charge-Trapping Technology |
940 | The role of plasma in plasma-enhanced atomic layer deposition of crystalline films |
941 | Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support |
942 | ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window" |
943 | Band offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy |
944 | Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition |
945 | Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition |
946 | Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon |
947 | Tuning the nanoscale morphology and optical properties of porous gold nanoparticles by surface passivation and annealing |
948 | Electrical characterizations of MIS structures based on variable-gap n(p)-HgCdTe grown by MBE on Si(0 1 3) substrates |
949 | XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films |
950 | Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films |
951 | Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2 |
952 | Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges |
953 | Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes |
954 | Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction |
955 | Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells |
956 | Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition |
957 | Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current |
958 | Optimization of Y2O3 dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells |
959 | Influence of Working Pressure on the Al2O3 Film Properties in Plasma-Enhanced Atomic Layer Deposition |
960 | Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties |
961 | On the role of nanoporosity in controlling the performance of moisture permeation barrier layers |
962 | Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach |
963 | Electrical and physical characteristics of high-k gated MOSFETs with in-situ H2O and O2 plasma formed interfacial layer |
964 | Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition |
965 | Plasma-enhanced atomic layer deposition of zinc phosphate |
966 | Plasma-enhanced atomic layer deposition of BaTiO3 |
967 | High wet-etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane |
968 | 1D versus 3D quantum confinement in 1-5 nm ZnO nanoparticle agglomerations for application in charge-trapping memory devices |
969 | Insulator-protected mechanically controlled break junctions for measuring single-molecule conductance in aqueous environments |
970 | Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries |
971 | Integration of plasmonic Ag nanoparticles as a back reflector in ultra-thin Cu(In,Ga)Se2 solar cells |
972 | Increment of the Dielectric Constant of Ta2O5 Thin Films by Retarding Interface Oxide Growth on Si Substrates |
973 | Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition |
974 | Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices |
975 | Topographically selective deposition |
976 | Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition |
977 | Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene |
978 | Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure |
979 | Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs |
980 | Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition |
981 | Firing Stable Al2O3/SiNx Layer Stack Passivation for the Front Side Boron Emitter of n-type Silicon Solar Cells |
982 | Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application |
983 | Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films |
984 | Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices |
985 | Resistive switching in HfO2-based atomic layer deposition grown metal-insulator-metal structures |
986 | High-κ Dielectric on ReS2: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al2O3 |
987 | Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching |
988 | Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching |
989 | AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments |
990 | Sub-10-nm ferroelectric Gd-doped HfO2 layers |
991 | Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films |
992 | Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2 |
993 | Lithium-Iron (III) Fluoride Battery with Double Surface Protection |
994 | Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films |
995 | Low-temperature plasma-enhanced atomic layer deposition of tin oxide electron selective layers for highly efficient planar perovskite solar cells |
996 | Direct measurement of coherent phonon dynamics in solution-processed stibnite thin films |
997 | Possible Candidates for Impurities in mc-Si Wafers Responsible for Light-Induced Lifetime Degradation and Regeneration |
998 | Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5 |
999 | Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application |
1000 | Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy |
1001 | Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers |
1002 | Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers |
1003 | Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition |
1004 | Electrical Properties of Atomic Layer Deposition HfO2 and HfOxNy on Si Substrates with Various Crystal Orientations |
1005 | Tri-gate InGaAs-OI junctionless FETs with PE-ALD Al2O3 gate dielectric and H2/Ar anneal |
1006 | Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition |
1007 | Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting |
1008 | Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition |
1009 | Correlation between ferroelectricity and ferroelectric orthorhombic phase of HfxZr1-xO2 thin films using synchrotron x-ray analysis |
1010 | Atomic layer deposition of ultrathin blocking layer for low-temperature solid oxide fuel cell on nanoporous substrate |
1011 | MANOS performance dependence on ALD Al2O3 oxidation source |
1012 | Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD) |
1013 | Al2O3/TiO2 Nanolaminate Thin Film Encapsulation for Organic Thin Film Transistors via Plasma-Enhanced Atomic Layer Deposition |
1014 | Growth of silica nanowires in vacuum |
1015 | Electron channel mobility in silicon-doped Ga2O3 MOSFETs with a resistive buffer layer |
1016 | Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition |
1017 | Characteristics of Charge Trap Flash Memory with Al2O3/(Ta/Nb)Ox/Al2O3 Multi-Layer |
1018 | Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films |
1019 | Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors |
1020 | Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System |
1021 | Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode |
1022 | Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources |
1023 | Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films |
1024 | Ion energy control during plasma-enhanced atomic layer deposition: enabling materials control and selective processing in the third dimension |
1025 | Theoretical Understanding of the Reaction Mechanism of SiO2 Atomic Layer Deposition |
1026 | Ultrasensitive Detection of 2,4-Dinitrophenol Using Nanowire Biosensor |
1027 | Performance and retention characteristics of nanocrystalline Si floating gate memory with an Al2O3 tunnel layer fabricated by plasma-enhanced atomic layer deposition |
1028 | Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges |
1029 | Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric |
1030 | MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion |
1031 | Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film |
1032 | Sub-7-nm textured ZrO2 with giant ferroelectricity |
1033 | Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor |
1034 | Tunable conduction type of solution-processed germanium nanoparticle based field effect transistors and their inverter integration |
1035 | Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition |
1036 | Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si |
1037 | Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor |
1038 | Impact of hydrogen on the permanent deactivation of the boron-oxygen-related recombination center in crystalline silicon |
1039 | Antireflection Coating on PMMA Substrates by Atomic Layer Deposition |
1040 | Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping |
1041 | Plasma enhanced atomic layer deposition of magnesium oxide as a passivation layer for enhanced photoluminescence of ZnO nanowires |
1042 | Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma |
1043 | Passivation effects of atomic-layer-deposited aluminum oxide |
1044 | Impact of interface materials on side permeation in indirect encapsulation of organic electronics |
1045 | Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film |
1046 | Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure |
1047 | Enhanced electrochemical performance of surface-treated Li[Ni0.8Co0.1Mn0.1]O2 cathode material for lithium-ion batteries |
1048 | Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer |
1049 | Comparison of thermal, plasma-enhanced and layer by layer Ar plasma treatment atomic layer deposition of Tin oxide thin films |
1050 | Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing |
1051 | PEALD grown high-k ZrO2 thin films on SiC group IV compound semiconductor |
1052 | Energy-enhanced atomic layer deposition for more process and precursor versatility |
1053 | Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source |
1054 | Band alignment and electrical properties of Al2O3/β-Ga2O3 heterojunctions |
1055 | Low Resistive Edge Contacts to CVD-Grown Graphene Using a CMOS Compatible Metal |
1056 | Fabrication and Properties of GaN MIS Capacitors with a Remote-Plasma Atomic-Layer-Deposited Al2O3 Gate Dielectric |
1057 | Lithium-Iron (III) Fluoride Battery with Double Surface Protection |
1058 | Effects of Remote Plasma Pre-oxidation of Si Substrates on the Characteristics of ALD-Deposited HfO2 Gate Dielectrics |
1059 | Atomic Layer Deposition of HfO2 Thin Films on Ultrathin SiO2 Formed by Remote Plasma Oxidation |
1060 | Electrical properties of MOS capacitors formed by PEALD grown Al2O3 on silicon |
1061 | XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films |
1062 | Localized dielectric breakdown and antireflection coating in metal-oxide-semiconductor photoelectrodes |
1063 | Self-assembled monolayers as a defect sealant of Al2O3 barrier layers grown by atomic layer deposition |
1064 | Using top graphene layer as sacrificial protection during dielectric atomic layer deposition |
1065 | Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications |
1066 | Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices |
1067 | Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition |
1068 | In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics |
1069 | Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films |
1070 | Properties of HfAlO film deposited by plasma enhanced atomic layer deposition |
1071 | Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas |
1072 | Molybdenum Disulfide Catalytic Coatings via Atomic Layer Deposition for Solar Hydrogen Production from Copper Gallium Diselenide Photocathodes |
1073 | Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell |
1074 | On the composition of luminescence spectra from heavily doped p-type silicon under low and high excitation |
1075 | Large area, patterned growth of 2D MoS2 and lateral MoS2-WS2 heterostructures for nano- and opto-electronic applications |
1076 | Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen |
1077 | Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure |
1078 | Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition |
1079 | Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD |
1080 | Patterned deposition by plasma enhanced spatial atomic layer deposition |
1081 | Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition |
1082 | Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2 |
1083 | Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers |
1084 | Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide |
1085 | Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces |
1086 | PEALD ZrO2 Films Deposition on TiN and Si Substrates |
1087 | High-Reflective Coatings For Ground and Space Based Applications |
1088 | Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation |
1089 | Controlled erbium incorporation and photoluminescence of Er-doped Y2O3 |
1090 | Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics |
1091 | Water Vapor Treatment of Low-Temperature Deposited SnO2 Electron Selective Layers for Efficient Flexible Perovskite Solar Cells |
1092 | Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition |
1093 | First principles mechanistic study of self-limiting oxidative adsorption of remote oxygen plasma during the atomic layer deposition of alumina |
1094 | Growth characteristics and electrical properties of La2O3 gate oxides grown by thermal and plasma-enhanced atomic layer deposition |
1095 | The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films |
1096 | Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma |
1097 | A Capacitance-to-Frequency Converter with On-Chip Passivated Microelectrodes for Bacteria Detection in Saline Buffers up to 575 MHz |
1098 | Role of the (Ta/Nb)Ox/Al2O3 interface on the flatband voltage shift for Al2O3/(Ta/Nb)Ox/Al2O3 multilayer charge trap capacitors |
1099 | Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS |
1100 | Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition |
1101 | Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film |
1102 | Flexible, light trapping substrates for organic photovoltaics |
1103 | Suppression of GeOx interfacial layer and enhancement of the electrical performance of the high-K gate stack by the atomic-layer-deposited AlN buffer layer on Ge metal-oxide-semiconductor devices |
1104 | Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO |
1105 | Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry |
1106 | Light response behaviors of amorphous In-Ga-Zn-O thin-film transistors via in situ interfacial hydrogen doping modulation |
1107 | A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors |
1108 | Ultra-thin Al2O3 coating on the acid-treated 0.3Li2MnO3·0.7LiMn0.60Ni0.25Co0.15O2 electrode for Li-ion batteries |
1109 | High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films |
1110 | Characteristics of Plasma-Enhanced Atomic-Layer Deposited (PEALD) SnO2 Thin Films |
1111 | Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization |
1112 | Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage |
1113 | Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD |
1114 | Irradiation effects of graphene-enhanced gallium nitride (GaN) metal-semiconductor-metal (MSM) ultraviolet photodetectors |
1115 | Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor |
1116 | Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition |
1117 | Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration |
1118 | Hafnia and alumina on sulphur passivated germanium |
1119 | Leakage Current Reduction in ALD-Al2O3 Dielectric Deposited on Si by High Pressure Deuterium Oxide Annealing |
1120 | PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads |
1121 | Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition |
1122 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |
1123 | Optical and Electrical Properties of AlxTi1-xO Films |
1124 | Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells |
1125 | Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon |
1126 | Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells |
1127 | Organic thin-film transistors with sub-10-micrometer channel length with printed polymer/carbon nanotube electrodes |
1128 | Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition |
1129 | Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge |
1130 | Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD |
1131 | Photoluminescence blue shift of indium phosphide nanowire networks with aluminum oxide coating |
1132 | Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating |
1133 | Influence of Al2O3 layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors |
1134 | Fiber-matrix interface reinforcement using Atomic Layer Deposition |
1135 | The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition |
1136 | Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process |
1137 | Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems |
1138 | Pt Nanocrystals Embedded in Remote Plasma Atomic-Layer-Deposited HfO2 for Nonvolatile Memory Devices |
1139 | The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain |
1140 | Graphene based on-chip variable optical attenuator operating at 855 nm wavelength |
1141 | Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films |
1142 | Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD |
1143 | IrO2 Nanodot Formation by Plasma Enhanced Atomic Layer Deposition as a Charge Storage Layer |
1144 | From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications |
1145 | (Invited) Characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 Capacitors |
1146 | Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping |
1147 | Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3 |
1148 | Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces |
1149 | Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al2O3 |
1150 | Nitrogen-Doping of Bulk and Nanotubular TiO2 Photocatalysts by Plasma-Assisted Atomic Layer Deposition |
1151 | Highly reflective polymeric substrates functionalized utilizing atomic layer deposition |
1152 | Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics |
1153 | Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides |
1154 | Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation |
1155 | Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells |
1156 | In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition |
1157 | Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors |
1158 | Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films |
1159 | Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3 gate dielectric thin films |
1160 | Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum |
1161 | Double nitridation of crystalline ZrO2/Al2O3 buffer gate stack with high capacitance, low leakage and improved thermal stability |
1162 | Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate |
1163 | Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure |
1164 | Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition |
1165 | AlGaN/GaN MIS-HEMTs With High Quality ALD-Al2O3 Gate Dielectric Using Water and Remote Oxygen Plasma As Oxidants |
1166 | Laminated Al2O3-HfO2 layers grown by atomic layer deposition for microelectronics applications |
1167 | Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C |
1168 | SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance |
1169 | Interfaces Formed by ALD Metal Oxide Growth on Metal Layers |
1170 | Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition |
1171 | Co/CoP Nanoparticles Encapsulated Within N, P-Doped Carbon Nanotubes on Nanoporous Metal-Organic Framework Nanosheets for Oxygen Reduction and Oxygen Evolution Reactions |
1172 | The important role of water in growth of monolayer transition metal dichalcogenides |
1173 | Influence of Al2O3 Gate Dielectric on Transistor Properties for IGZO Thin Film Transistor |
1174 | Controlled erbium incorporation and photoluminescence of Er-doped Y2O3 |
1175 | In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd |
1176 | Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms |
1177 | In-gap states in titanium dioxide and oxynitride atomic layer deposited films |
1178 | Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer |
1179 | Thin effective oxide thickness (~0.5 nm) and low leakage current gate dielectric for Ge MOS devices by plasma nitrided Al2O3 intermediate layer |
1180 | Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition |
1181 | Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition |
1182 | Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation |
1183 | Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride |
1184 | Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering |
1185 | Electrical Properties of Atomic Layer Deposition HfO2 and HfOxNy on Si Substrates with Various Crystal Orientations |
1186 | An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor |
1187 | Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors |
1188 | Atomic layer deposition of metal-oxide thin films on cellulose fibers |
1189 | Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions |
1190 | Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features |
1191 | Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon |
1192 | Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge(100) prepared by PEALD |
1193 | The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor |
1194 | Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC |
1195 | Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition |
1196 | Effect of Deposition Method on Valence Band Offsets of SiO2 and Al2O3 on (Al0.14Ga0.86)2O3 |
1197 | The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells |
1198 | Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure |
1199 | Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films |
1200 | Detection of Streptavidin-Biotin Complexes Using a Highly Sensitive AlGaN/GaN-Based Extended-Gate MISHEMT-Type Biosensor |
1201 | Designing high performance precursors for atomic layer deposition of silicon oxide |
1202 | Poly-Si gate electrodes for AlGaN/GaN HEMT with high reliability and low gate leakage current |
1203 | Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces |
1204 | Remote Plasma ALD of Platinum and Platinum Oxide Films |
1205 | Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor |
1206 | Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3 |
1207 | Systematic efficiency study of line-doubled zone plates |
1208 | Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions |
1209 | Effects of Surface Passivation and Deposition Methods on the 1/f Noise Performance of AlInN/AlN/GaN High Electron Mobility Transistors |
1210 | Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition |
1211 | Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications |
1212 | Remote plasma atomic layer deposited Al2O3 4H-SiC MOS capacitor with remote H2 plasma passivation and post metallization annealing |
1213 | Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits |
1214 | Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors |
1215 | Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition |
1216 | Atomic Layer Deposition of the Conductive Delafossite PtCoO2 |
1217 | Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition |
1218 | Antireflection Coating on PMMA Substrates by Atomic Layer Deposition |
1219 | Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing |
1220 | Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD |
1221 | Field-effect passivation of Si by ALD-Al2O3: Second harmonic generation monitoring and simulation |
1222 | Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition |
1223 | Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide |
1224 | Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination |
1225 | Al2O3 multi-density layer structure as a moisture permeation barrier deposited by radio frequency remote plasma atomic layer deposition |
1226 | Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition |
1227 | Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition |
1228 | Effect of Buffer Layer for HfO2 Gate Dielectrics Grown by Remote Plasma Atomic Layer Deposition |
1229 | Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer |
1230 | Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition |
1231 | Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources |
1232 | Effects of TiO2 Interfacial Atomic Layers on Device Performances and Exciton Dynamics in ZnO Nanorod Polymer Solar Cells |
1233 | Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification |
1234 | Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures |
1235 | Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell |
1236 | Study on the resistive switching time of TiO2 thin films |
1237 | Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors |
1238 | Formation of Al2O3 Film on Si Substrate by Microwave Generated Remote Plasma Assisted Atomic Layer Deposition Technique |