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Publication Information

Title: On the role of nanoporosity in controlling the performance of moisture permeation barrier layers

Type: Journal

Info: Microporous and Mesoporous Materials, Volume 188, April 2014, Pages 163-171

Date: 2014-01-10

DOI: http://dx.doi.org/10.1016/j.micromeso.2014.01.013

Author Information

Name

Institution

Eindhoven University of Technology

Films

Deposition Temperature Range = 25-100C

75-24-1

7782-44-7

Deposition Temperature Range = 25-100C

27804-64-4

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

FTIR, Fourier Transform InfraRed spectroscopy

Unknown

Thickness

Ellipsometry

Unknown

Chemical Composition, Impurities

RBS, Rutherford Backscattering Spectrometry

Unknown

Chemical Composition, Impurities

TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis

Unknown

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Water Vapor Transmission Rate (WVTR)

Calcium Test

Unknown

Porosity

Ellipsometric Porosimetry (EP)

Unknown

Pore Size Distribution

Ellipsometric Porosimetry (EP)

Unknown

Substrates

Keywords

Diffusion Barrier

Porosity

Notes

Oxford Instruments FlexAL PEALD Al2O3 and SiO2 moisture permeation barrier study.

271



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