Title: Symmetrical Al2O3-based passivation layers for p- and n-type silicon
Type: Conference Proceedings
Info: Solar Energy Materials and Solar Cells, Volume 131, December 2014, Pages 72-76, SI: SiliconPV 2014
Date: 2014-06-02
DOI: http://dx.doi.org/10.1016/j.solmat.2014.06.005
Name
Institution
NaMLab gGmbH
352535-01-4
Characteristic
Analysis
Diagnostic
Thickness
Ellipsometry
-
Thin Film Solar Cell
Passivation
PEALD SiO2 and thermal ALD Al2O3 and HfO2 for PV passivation application.
290
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