Daniel Kai Simon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Daniel Kai Simon returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
2Symmetrical Al2O3-based passivation layers for p- and n-type silicon
3Trapped charge densities in Al2O3-based silicon surface passivation layers
4Low-thermal budget flash light annealing for Al2O3 surface passivation