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Daniel Kai Simon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Daniel Kai Simon returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Trapped charge densities in Al2O3-based silicon surface passivation layers
2Symmetrical Al2O3-based passivation layers for p- and n-type silicon
3Low-thermal budget flash light annealing for Al2O3 surface passivation
4On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes