Publication Information

Title:
Low-thermal budget flash light annealing for Al2O3 surface passivation
Type:
Journal
Info:
physica status solidi (RRL) - Rapid Research Letters Volume 9, Issue 11, pages 631--635, 2015
Date:
2015-10-12

Author Information

Name Institution
Daniel Kai SimonNaMLab gGmbH
Thomas HenkeTechnische Universit├Ąt Dresden
Paul Matthias JordanNaMLab gGmbH
Franz P. G. FenglerNaMLab gGmbH
Thomas MikolajickNaMLab gGmbH
Johann W. BarthaTechnische Universit├Ąt Dresden
Ingo DirnstorferNaMLab gGmbH

Films

Plasma Al2O3

Hardware used: Unknown


Film/Plasma Properties

Characteristic: Interface Trap Density
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Fixed Charge
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Lifetime
Analysis: -

Substrates

Keywords

Passivation

Notes

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