Publication Information

Title: Low-thermal budget flash light annealing for Al2O3 surface passivation

Type: Journal

Info: physica status solidi (RRL) - Rapid Research Letters Volume 9, Issue 11, pages 631--635, 2015

Date: 2015-10-12

DOI: http://dx.doi.org/10.1002/pssr.201510306

Author Information

Name

Institution

NaMLab gGmbH

Technische Universit├Ąt Dresden

NaMLab gGmbH

NaMLab gGmbH

NaMLab gGmbH

Technische Universit├Ąt Dresden

NaMLab gGmbH

Films

Plasma Al2O3 using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Interface Trap Density

C-V, Capacitance-Voltage Measurements

Unknown

Fixed Charge

C-V, Capacitance-Voltage Measurements

Unknown

Lifetime

Unknown

Unknown

Substrates

Keywords

Passivation

Notes

507



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