Thomas Mikolajick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Thomas Mikolajick returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Breakdown and Protection of ALD Moisture Barrier Thin Films
2Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
3Low-thermal budget flash light annealing for Al2O3 surface passivation
4On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
5Trapped charge densities in Al2O3-based silicon surface passivation layers