Thomas Mikolajick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Thomas Mikolajick returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of ferroelectric Hf0.5Zr0.5O2 on single-layer, CVD-grown graphene
2Breakdown and Protection of ALD Moisture Barrier Thin Films
3Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
4Low-thermal budget flash light annealing for Al2O3 surface passivation
5On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
6Trapped charge densities in Al2O3-based silicon surface passivation layers
7Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films