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The publication database currently has 1567 entries.

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In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films

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195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

Thomas Mikolajick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Thomas Mikolajick returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Breakdown and Protection of ALD Moisture Barrier Thin Films
2	Film properties of low temperature HfO₂ grown with H₂O, O₃, or remote O₂-plasma
3	Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films
4	Low-thermal budget flash light annealing for Al₂O₃ surface passivation
5	On the Control of the Fixed Charge Densities in Al₂O₃ Based Silicon Surface Passivation Schemes
6	Trapped charge densities in Al₂O₃-based silicon surface passivation layers