Thomas Mikolajick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Thomas Mikolajick returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Breakdown and Protection of ALD Moisture Barrier Thin Films
2	Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
3	Low-thermal budget flash light annealing for Al2O3 surface passivation
4	On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
5	Trapped charge densities in Al2O3-based silicon surface passivation layers

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