Your search for plasma enhanced atomic layer deposition publications authored by Thomas Mikolajick returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Breakdown and Protection of ALD Moisture Barrier Thin Films|
|2||Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma|
|3||Low-thermal budget flash light annealing for Al2O3 surface passivation|
|4||On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes|
|5||Trapped charge densities in Al2O3-based silicon surface passivation layers|
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