Ingo Dirnstorfer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ingo Dirnstorfer returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Trapped charge densities in Al2O3-based silicon surface passivation layers
2Low-thermal budget flash light annealing for Al2O3 surface passivation
3On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes