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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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Ingo Dirnstorfer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ingo Dirnstorfer returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Trapped charge densities in Al2O3-based silicon surface passivation layers
2Low-thermal budget flash light annealing for Al2O3 surface passivation
3On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes