Johann W. Bartha Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Johann W. Bartha returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
2Breakdown and Protection of ALD Moisture Barrier Thin Films
3Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements
4Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films
5Controlling threshold voltage and leakage currents in vertical organic field-effect transistors by inversion mode operation
6Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers
7In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
8Low-thermal budget flash light annealing for Al2O3 surface passivation
9In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films