Johann W. Bartha Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Johann W. Bartha returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers
2In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
3In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
4Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films
5High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
6Low-thermal budget flash light annealing for Al2O3 surface passivation
7Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements
8Breakdown and Protection of ALD Moisture Barrier Thin Films
9Controlling threshold voltage and leakage currents in vertical organic field-effect transistors by inversion mode operation