Diaminosilane, SiH2(NH2)2, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
2Trapped charge densities in Al2O3-based silicon surface passivation layers
3Symmetrical Al2O3-based passivation layers for p- and n-type silicon