Diaminosilane, SiH2(NH2)2, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1Symmetrical Al2O3-based passivation layers for p- and n-type silicon
2Trapped charge densities in Al2O3-based silicon surface passivation layers
3On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes