Publication Information

Title: Flexible insulator of hollow SiO2 spheres and polyimide hybrid for flexible OLED

Type: Journal

Info: Phys. Chem. Chem. Phys., 2015,17, 2416-2420

Date: 2014-11-25

DOI: http://dx.doi.org/10.1039/C4CP04266B

Author Information

Name

Institution

Sungkyunkwan University

Films

Plasma SiO2 using Synos PEALD

Deposition Temperature = 80C

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Dielectric Constant, Permittivity

Unknown

Unknown

Thermal Stability

Unknown

Unknown

Leakage Current

Unknown

Unknown

Substrates

Keywords

Flexible Circuits

OLED

Notes

251



Shortcuts



© 2014-2018 plasma-ald.com