Flexible insulator of hollow SiO2 spheres and polyimide hybrid for flexible OLED

Type:
Journal
Info:
Phys. Chem. Chem. Phys., 2015,17, 2416-2420
Date:
2014-11-25

Author Information

Name Institution
Min-Kyu KimSungkyunkwan University

Films

Plasma SiO2

Hardware used: Synos PEALD


Film/Plasma Properties

Characteristic: Dielectric Constant, Permittivity
Analysis: -

Characteristic: Thermal Stability
Analysis: -

Characteristic: Leakage Current
Analysis: -

Substrates

Notes

251