Min-Kyu Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Min-Kyu Kim returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
2Flexible insulator of hollow SiO2 spheres and polyimide hybrid for flexible OLED
3Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition