Title: Influence of Pre and Post-treatments on Plasma Enhanced ALD SiO2 and Al2O3 layers on GaN
Type: Conference Proceedings
Info: 2015 Annual Meeting of the APS Four Corners Section
Date: 2015-10-16
DOI: http://meetings.aps.org/Meeting/4CF15/Session/D6.2
Name
Institution
Arizona State University
Characteristic
Analysis
Diagnostic
Breakdown Voltage
I-V, Current-Voltage Measurements
-
Leakage Current
I-V, Current-Voltage Measurements
-
Unknown
XPS, X-ray Photoelectron Spectroscopy
-
GaN
490
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