Your search for plasma enhanced atomic layer deposition publications authored by Mei Hao returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces|
|2||Influence of Pre and Post-treatments on Plasma Enhanced ALD SiO2 and Al2O3 layers on GaN|
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