Publication Information

Title:
Room temperature CO2 detection using interdigitated capacitors with heteropolysiloxane sensing films
Type:
Conference Proceedings
Info:
2016 IEEE SENSORS
Date:
2016-10-30

Author Information

Name Institution
Choongsoon KimGeorgia Institute of Technology
Spyridon PavlidisGeorgia Institute of Technology
Min-gu KimGeorgia Institute of Technology
Oliver BrandGeorgia Institute of Technology
Hang ChenGeorgia Institute of Technology

Films

Plasma SiO2

Hardware used: Unknown


Film/Plasma Properties

Substrates

Keywords

Notes

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