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Publication Information
Title:
Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2
Type:
Journal
Info:
Chem. Commun., 2015, 51, 1341-1344
Date:
2014-12-01
Author Information
| Name | Institution |
|---|---|
| Guo-Yong Fang | Nanjing University |
Films
Film/Plasma Properties
Substrates
Keywords
| Density Functional Theory (DFT) |
Notes
| Density Functional Theory (DFT) of SiO2 PEALD with aminosilanes. |
| 285 |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |