2021 Year in Review
The publication database currently has 1616 entries.
Search from:
202 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
250 Film and Plasma Characteristics
88 Theses
Use Advanced Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
Contact Us
Advertising
Recent Database Additions
Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
Search 1616 plasma ALD publications by:
Search 1616 plasma ALD publications by:
Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2
Type:
Journal
Info:
Chem. Commun., 2015, 51, 1341-1344
Date:
2014-12-01
Author Information
| Name | Institution |
|---|---|
| Guo-Yong Fang | Nanjing University |
Films
Film/Plasma Properties
Substrates
Keywords
| Density Functional Theory (DFT) |
Notes
| Density Functional Theory (DFT) of SiO2 PEALD with aminosilanes. |
| 285 |