The publication database currently has 1673 entries.
Use Advanced Search for more complex searches
Recent Database Additions
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2
Type:
Journal
Info:
Chem. Commun., 2015, 51, 1341-1344
Date:
2014-12-01
Author Information
| Name | Institution |
|---|---|
| Guo-Yong Fang | Nanjing University |
Films
Film/Plasma Properties
Substrates
Keywords
| Density Functional Theory (DFT) |
Notes
| Density Functional Theory (DFT) of SiO2 PEALD with aminosilanes. |
| 285 |