Title: Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2
Type: Journal
Info: Chem. Commun., 2015, 51, 1341-1344
Date: 2014-12-01
DOI: http://dx.doi.org/10.1039/C4CC08004A
Name
Institution
Nanjing University
Characteristic
Analysis
Diagnostic
Density Functional Theory (DFT)
Density Functional Theory (DFT) of SiO2 PEALD with aminosilanes.
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