Publication Information

Title:
Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2
Type:
Journal
Info:
Chem. Commun., 2015, 51, 1341-1344
Date:
2014-12-01

Author Information

Name Institution
Guo-Yong FangNanjing University

Films

Plasma SiO2

Hardware used: Unknown


CAS#: 7782-44-7

Film/Plasma Properties

Substrates

Keywords

Density Functional Theory (DFT)

Notes

Density Functional Theory (DFT) of SiO2 PEALD with aminosilanes.
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