Design and development of nanoimprint-enabled structures for molecular motor devices
Type:
Journal
Info:
Mater. Res. Express 6 (nov) 025057
Date:
2018-10-31
Author Information
| Name | Institution |
|---|---|
| Frida W. Lindberg | Lund University |
| Till Korten | Technische Universität Dresden |
| Anette Löfstrand | Lund University |
| Mohammad A. Rahman | Linnaeus University |
| Mariusz Graczyk | Lund University |
| Alf Månsson | Linnaeus University |
| Heiner Linke | Lund University |
| Ivan Maximov | Lund University |
Films
Plasma SiO2
Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
Film/Plasma Properties
Substrates
| Cr |
Notes
| 1418 |