Publication Information

Title:
Design and development of nanoimprint-enabled structures for molecular motor devices
Type:
Journal
Info:
Mater. Res. Express 6 (nov) 025057
Date:
2018-10-31

Author Information

Name Institution
Frida W. LindbergLund University
Till KortenTechnische Universität Dresden
Anette LöfstrandLund University
Mohammad A. RahmanLinnaeus University
Mariusz GraczykLund University
Alf MånssonLinnaeus University
Heiner LinkeLund University
Ivan MaximovLund University

Films

Plasma SiO2


Film/Plasma Properties

Substrates

Cr

Keywords

Etch Mask

Notes

1418