Marc Aoulaiche Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marc Aoulaiche returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Extensionless UTBB FDSOI Devices in Enhanced Dynamic Threshold Mode under Low Power Point of View
2Understanding and optimizing the floating body retention in FDSOI UTBOX
3Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
4Investigation of Bulk and DTMOS triple-gate devices under 60 MeV proton irradiation