Marc Aoulaiche Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marc Aoulaiche returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Extensionless UTBB FDSOI Devices in Enhanced Dynamic Threshold Mode under Low Power Point of View
2Investigation of Bulk and DTMOS triple-gate devices under 60 MeV proton irradiation
3Understanding and optimizing the floating body retention in FDSOI UTBOX
4Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition