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The publication database currently has 1559 entries.
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192 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics
83 Theses

Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)


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Recent Database Additions
Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
Search 1559 plasma ALD publications by:
192 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics

M. Jurczak Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. Jurczak returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A PEALD Tunnel Dielectric for Three-Dimensional Non-Volatile Charge-Trapping Technology
2Fully CMOS BEOL compatible HfO2 RRAM cell, with low (μA) program current, strong retention and high scalability, using an optimized plasma enhanced atomic layer deposition (PEALD) process for TiN electrode
3Nanoscopic structural rearrangements of the Cu-filament in conductive-bridge memories
4Understanding and optimizing the floating body retention in FDSOI UTBOX
5Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition

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