Publication Information

Title:
Nanoscopic structural rearrangements of the Cu-filament in conductive-bridge memories
Type:
Journal
Info:
Nanoscale 2016, Volume 8, Issue 29, pp 13915-13923
Date:
2016-01-24

Author Information

Name Institution
U. CelanoKU Leuven
G. GiammariaKU Leuven
L. GouxIMEC
A. BelmonteKU Leuven
M. JurczakKU Leuven
Wilfried VandervorstKU Leuven

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Substrates

Cu

Keywords

Notes

761