Minh D. Nguyen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Minh D. Nguyen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films|
|2||Understanding and optimizing the floating body retention in FDSOI UTBOX|