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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
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Minh D. Nguyen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Minh D. Nguyen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Understanding and optimizing the floating body retention in FDSOI UTBOX
2Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films