Publication Information

Title:
Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure
Type:
Journal
Info:
Materials Research Bulletin 64 (2015) 1-5
Date:
2014-12-03

Author Information

Name Institution
Ji-Hoon AhnSamsung Electronics Co.

Films

Plasma SrO



Plasma Al2O3



Film/Plasma Properties

Substrates

Keywords

Notes

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