Publication Information

Title: Fast Flexible Plastic Substrate ZnO Circuits

Type: Journal

Info: IEEE Electron Device Letters, Vol. 31, No. 4, April 2010

Date: 2010-03-04

DOI: http://dx.doi.org/10.1109/LED.2010.2041321

Author Information

Name

Institution

The Pennsylvania State University

The Pennsylvania State University

The Pennsylvania State University

Films

Plasma ZnO using Unknown

Deposition Temperature Range N/A

557-20-0

10024-97-2

Plasma Al2O3 using Unknown

Deposition Temperature Range N/A

75-24-1

124-38-9

Thermal Al2O3 using Unknown

Deposition Temperature Range N/A

75-24-1

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Leakage Current

Custom

Custom

Mobility

I-V, Current-Voltage Measurements

Custom

Threshold Voltage

I-V, Current-Voltage Measurements

Custom

Subthreshold Slope

I-V, Current-Voltage Measurements

Custom

On/Off Current Ratio

I-V, Current-Voltage Measurements

Custom

Threshold Voltage Shift

Custom

Custom

Substrates

Polyimide

Keywords

Flexible Circuits

TFT, Thin Film Transistor

Notes

ZnO patterned in dilute HCl.

Al2O3 patterned in 80C phosphoric acid.

Polyimide substrate glass transition temperature ~354C.

Thermal Al2O3 films used for passivation.

100



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