Publication Information

Title: Flexible Technologies for Self-Powered Wearable Health and Environmental Sensing

Type: Journal

Info: Proceedings of the IEEE (Volume:103, Issue:4)

Date: 2015-03-03

DOI: http://dx.doi.org/10.1109/JPROC.2015.2412493

Author Information

Name

Institution

North Carolina State University

North Carolina State University

University of Virginia

The Pennsylvania State University

North Carolina State University

University of Virginia

North Carolina State University

North Carolina State University

North Carolina State University

North Carolina State University

The Pennsylvania State University

North Carolina State University

University of Michigan

North Carolina State University

Films

Plasma ZnO using Unknown

Deposition Temperature Range N/A

Plasma Al2O3 using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

PEALD ZnO and Al2O3 for thin film transistors for body motion energy harvesting application.

335



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