Flexible Technologies for Self-Powered Wearable Health and Environmental Sensing

Type:
Journal
Info:
Proceedings of the IEEE (Volume:103, Issue:4)
Date:
2015-03-03
DOI:
http://dx.doi.org/10.1109/JPROC.2015.2412493

Author Information

Name Institution
Veena MisraNorth Carolina State University
Alper BozkurtNorth Carolina State University
Benton CalhounUniversity of Virginia
Thomas N. JacksonThe Pennsylvania State University
Jesse S. JurNorth Carolina State University
John LachUniversity of Virginia
Bongmook LeeNorth Carolina State University
John MuthNorth Carolina State University
Ömer OralkanNorth Carolina State University
Mehmet ÖztürkNorth Carolina State University
Susan Trolier-McKinstryThe Pennsylvania State University
Daryoosh VashaeeNorth Carolina State University
David WentzloffUniversity of Michigan
Yong ZhuNorth Carolina State University

Films

Plasma ZnO

Hardware used: Unknown
Deposition Temperature Range N/A

Plasma Al2O3

Hardware used: Unknown
Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

Notes

PEALD ZnO and Al2O3 for thin film transistors for body motion energy harvesting application.
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