
Improvement on the Passivation Effect of Al2O3 Layer Deposited by PA-ALD in Crystalline Silicon Solar Cells
Type:
Journal
Info:
J . KIEEME, V ol. 26, No. 10, pp. 754-759, October 2013
Date:
2013-09-24
Author Information
Name | Institution |
---|---|
Se Young Song | Chungnam National University |
Min Gu Kang | Korea Institute of Energy Research |
Hee-eun Song | Korea Institute of Energy Research |
Hyo Sik Chang | Chungnam National University |
Films
Film/Plasma Properties
Characteristic: Interfacial Layer
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Characteristic: Interfacial Layer
Analysis: TEM, Transmission Electron Microscope
Characteristic: Blistering
Analysis: -
Characteristic: Lifetime
Analysis: -
Substrates
Si(100) |
Notes
Written in Korean. |
569 |