2021 Year in Review
The publication database currently has 1616 entries.
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202 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
250 Film and Plasma Characteristics
88 Theses
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Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
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Improvement on the Passivation Effect of Al2O3 Layer Deposited by PA-ALD in Crystalline Silicon Solar Cells
Type:
Journal
Info:
J . KIEEME, V ol. 26, No. 10, pp. 754-759, October 2013
Date:
2013-09-24
Author Information
| Name | Institution |
|---|---|
| Se Young Song | Chungnam National University |
| Min Gu Kang | Korea Institute of Energy Research |
| Hee-eun Song | Korea Institute of Energy Research |
| Hyo Sik Chang | Chungnam National University |
Films
Film/Plasma Properties
Characteristic: Interfacial Layer
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Characteristic: Interfacial Layer
Analysis: TEM, Transmission Electron Microscope
Characteristic: Blistering
Analysis: -
Characteristic: Lifetime
Analysis: -
Substrates
| Si(100) |
Keywords
Notes
| Written in Korean. |
| 569 |