Simultaneous Roll Transfer and Interconnection of Flexible Silicon NAND Flash Memory

Type:
Journal
Info:
Adv. Mater. 2016 28(38) 8371--8378
Date:
2016-06-27
DOI:
http://dx.doi.org/10.1002/adma.201602339

Author Information

Name Institution
Do Hyun KimKorea Advanced Institute of Science and Technology
Hyeon Gyun YooKorea Advanced Institute of Science and Technology
Sung Min HongKorea Institute of Machinery and Materials
Bongkyun JangKorea Institute of Machinery and Materials
Dae Yong ParkKorea Advanced Institute of Science and Technology
Daniel J. JoeKorea Advanced Institute of Science and Technology
Jae-Hyun KimKorea Institute of Machinery and Materials
Keon Jae LeeKorea Advanced Institute of Science and Technology

Films

Plasma Al2O3

Hardware used: Unknown
Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

Notes

795