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Search 1536 plasma ALD publications by:
Publication Information
Title:
SiNx passivated GaN HEMT by plasma enhanced atomic layer deposition
Type:
Conference Proceedings
Info:
43rd International Symposium on Compound Semiconductors (ISCS)
Date:
2016-06-26
Author Information
Name | Institution |
---|---|
Takayuki Suzuki | Toyota Technological Institute |
Tomiaki Yamada | Toyota Technological Institute |
Ryosuke Kawai | Toyota Technological Institute |
Shohei Kawaguchi | Toyota Technological Institute |
Dongyan Zhang | Toyota Technological Institute |
Naotaka Iwata | Toyota Technological Institute |
Films
Film/Plasma Properties
Substrates
GaN |
Keywords
Passivation |
Notes
969 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |