Dongyan Zhang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dongyan Zhang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Excellent surface passivation of crystalline silicon by ternary AlxMg1-xOy thin films
2SiNx passivated GaN HEMT by plasma enhanced atomic layer deposition


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