Your search for plasma enhanced atomic layer deposition publications authored by Naotaka Iwata returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Excellent surface passivation of crystalline silicon by ternary AlxMg1-xOy thin films|
|2||SiNx passivated GaN HEMT by plasma enhanced atomic layer deposition|
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