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Naotaka Iwata Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Naotaka Iwata returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Excellent surface passivation of crystalline silicon by ternary AlxMg1-xOy thin films |
| 2 | SiNx passivated GaN HEMT by plasma enhanced atomic layer deposition |