Search 1530 plasma ALD publications by:
Search 1530 plasma ALD publications by:
Publication Information
Title:
Detailed Atomistic Modeling of Si(110) Passivation by Atomic Layer Deposition of Al2O3
Type:
Other
Info:
Practical Aspects of Computational Chemistry IV, p. 303-351, 2016.
Date:
2016-05-18
Author Information
Name | Institution |
---|---|
Andrey A. Rybakov | Moscow State University |
Alexander V. Larin | Moscow State University |
Daniel P. Vercauteren | University of Namur |
Georgy M. Zhidomirov | Moscow State University |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
789 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |