Georgy M. Zhidomirov Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Georgy M. Zhidomirov returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|DFT modeling of plasma-assisted atomic layer deposition for Si(110) passivation: formation of boehmite-like chains as γ-Al2O3 precursors
|Detailed Atomistic Modeling of Si(110) Passivation by Atomic Layer Deposition of Al2O3