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Publication Information

Title: Impact of gate insulator on the dc and dynamic performance of AlGaN/GaN MIS-HEMTs

Type: Journal

Info: Microelectronics Reliability Volume 55, Issues 9-10, August-September 2015, Pages 1692-1696

Date: 2015-06-29

DOI: http://dx.doi.org/10.1016/j.microrel.2015.06.130

Author Information

Name

Institution

University of Padova

University of Padova

University of Padova

University of Padova

IMEC

IMEC

IMEC

IMEC

University of Padova

University of Padova

Films

Plasma SiNx using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Transistor Characteristics

Unknown

Unknown

Substrates

AlGaN

GaN

Keywords

Gate Dielectric

Notes

489


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