Marleen Van Hove Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marleen Van Hove returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Combined PEALD Gate-Dielectric and In-Situ SiN Cap-Layer for Reduced Vth Shift and RDS-ON Dispersion of AlGaN/GaN HEMTs on 200 mm Si Wafer
2Correlation of interface states/border traps and threshold voltage shift on AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors
3Impact of gate insulator on the dc and dynamic performance of AlGaN/GaN MIS-HEMTs
4Performance Optimization of Au-Free Lateral AlGaN/GaN Schottky Barrier Diode With Gated Edge Termination on 200-mm Silicon Substrate
5Reliability and parasitic issues in GaN-based power HEMTs: a review
6Toward Understanding Positive Bias Temperature Instability in Fully Recessed-Gate GaN MISFETs
7Trapping and reliability issues in GaN-based MIS HEMTs with partially recessed gate