Search 1536 plasma ALD publications by:
Search 1536 plasma ALD publications by:
Publication Information
Title:
Reliability and parasitic issues in GaN-based power HEMTs: a review
Type:
Journal
Info:
2016 Semicond. Sci. Technol. 31, 093004
Date:
2016-06-22
Author Information
Name | Institution |
---|---|
Gaudenzio Meneghesso | University of Padova |
Matteo Meneghini | University of Padova |
Isabella Rossetto | University of Padova |
Davide Bisi | University of Padova |
Steve Stoffels | IMEC |
Marleen Van Hove | IMEC |
Stefaan Decoutere | IMEC |
Enrico Zanoni | University of Padova |
Films
Film/Plasma Properties
Substrates
GaN |
Keywords
Notes
964 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |