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Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Reliability and parasitic issues in GaN-based power HEMTs: a review
Type:
Journal
Info:
2016 Semicond. Sci. Technol. 31, 093004
Date:
2016-06-22
Author Information
| Name | Institution |
|---|---|
| Gaudenzio Meneghesso | University of Padova |
| Matteo Meneghini | University of Padova |
| Isabella Rossetto | University of Padova |
| Davide Bisi | University of Padova |
| Steve Stoffels | IMEC |
| Marleen Van Hove | IMEC |
| Stefaan Decoutere | IMEC |
| Enrico Zanoni | University of Padova |
Films
Film/Plasma Properties
Substrates
| GaN |
Keywords
Notes
| 964 |