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The publication database currently has 1567 entries.

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In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films

Search 1567 plasma ALD publications by:

195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

Reliability and parasitic issues in GaN-based power HEMTs: a review

Type:

Journal

Info:

2016 Semicond. Sci. Technol. 31, 093004

Date:

2016-06-22

DOI:

http://dx.doi.org/10.1088/0268-1242/31/9/093004

Author Information

Name	Institution
Gaudenzio Meneghesso	University of Padova
Matteo Meneghini	University of Padova
Isabella Rossetto	University of Padova
Davide Bisi	University of Padova
Steve Stoffels	IMEC
Marleen Van Hove	IMEC
Stefaan Decoutere	IMEC
Enrico Zanoni	University of Padova

Films

Plasma SiN_x

Hardware used: Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

GaN

Keywords

Notes

964